Wafer Fabrication: Factory Performance and Analysis

Wafer Fabrication: Factory Performance and Analysis PDF

Author: Linda F. Atherton

Publisher: Springer Science & Business Media

Published: 1995-11-30

Total Pages: 498

ISBN-13: 9780792396192

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This book is concerned with wafer fabrication and the factories that manufacture microprocessors and other integrated circuits. With the invention of the transistor in 1947, the world as we knew it changed. The transistor led to the microprocessor, and the microprocessor, the guts of the modern computer, has created an epoch of virtually unlimited information processing. The electronics and computer revolution has brought about, for better or worse, a new way of life. This revolution could not have occurred without wafer fabrication, and its associated processing technologies. A microprocessor is fabricated via a lengthy, highly-complex sequence of chemical processes. The success of modern chip manufacturing is a miracle of technology and a tribute to the hundreds of engineers who have contributed to its development. This book will delineate the magnitude of the accomplishment, and present methods to analyze and predict the performance of the factories that make the chips. The set of topics covered juxtaposes several disciplines of engineering. A primary subject is the chemical engineering aspects of the electronics industry, an industry typically thought to be strictly an electrical engineer's playground. The book also delves into issues of manufacturing, operations performance, economics, and the dynamics of material movement, topics often considered the domain of industrial engineering and operations research. Hopefully, we have provided in this work a comprehensive treatment of both the technology and the factories of wafer fabrication. Novel features of these factories include long process flows and a dominance of processing over operational issues.

Wafer Fabrication: Factory Performance and Analysis

Wafer Fabrication: Factory Performance and Analysis PDF

Author: Linda F. Atherton

Publisher: Springer

Published: 1995-12-14

Total Pages: 0

ISBN-13: 9781461312918

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This book is concerned with wafer fabrication and the factories that manufacture microprocessors and other integrated circuits. With the invention of the transistor in 1947, the world as we knew it changed. The transistor led to the microprocessor, and the microprocessor, the guts of the modern computer, has created an epoch of virtually unlimited information processing. The electronics and computer revolution has brought about, for better or worse, a new way of life. This revolution could not have occurred without wafer fabrication, and its associated processing technologies. A microprocessor is fabricated via a lengthy, highly-complex sequence of chemical processes. The success of modern chip manufacturing is a miracle of technology and a tribute to the hundreds of engineers who have contributed to its development. This book will delineate the magnitude of the accomplishment, and present methods to analyze and predict the performance of the factories that make the chips. The set of topics covered juxtaposes several disciplines of engineering. A primary subject is the chemical engineering aspects of the electronics industry, an industry typically thought to be strictly an electrical engineer's playground. The book also delves into issues of manufacturing, operations performance, economics, and the dynamics of material movement, topics often considered the domain of industrial engineering and operations research. Hopefully, we have provided in this work a comprehensive treatment of both the technology and the factories of wafer fabrication. Novel features of these factories include long process flows and a dominance of processing over operational issues.

Wafer Fabrication

Wafer Fabrication PDF

Author: Jie Zhang

Publisher: Walter de Gruyter GmbH & Co KG

Published: 2018-09-24

Total Pages: 284

ISBN-13: 3110487470

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This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

Variation Modeling, Analysis and Control for Multistage Wafer Manufacturing Processes

Variation Modeling, Analysis and Control for Multistage Wafer Manufacturing Processes PDF

Author: Ran Jin

Publisher:

Published: 2011

Total Pages:

ISBN-13:

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Geometric quality variables of wafers, such as BOW and WARP, are critical in their applications. A large variation of these quality variables reduces the number of conforming products in the downstream production. Therefore, it is important to reduce the variation by variation modeling, analysis and control for multistage wafer manufacturing processes (MWMPs). First, an intermediate feedforward control strategy is developed to adjust and update the control actions based on the online measurements of intermediate wafer quality measurements. The control performance is evaluated in a MWMP to transform ingots into polished wafers. However, in a complex multistage manufacturing process, the quality variables may have nonlinear relationship with the parameters of the predictors. In this case, piecewise linear regression tree (PLRT) models are used to address nonlinear relationships in MWMP to improve the model prediction performance. The obtained PLRT model is further reconfigured to be complied with the physical layout of the MWMP for feedforward control purposes. The procedure and effectiveness of the proposed method is shown in a case study of a MWMP. Furthermore, as the geometric profiles and quality variables are important quality features for a wafer, fast and accurate measurements of those features are crucial for variation reduction and feedforward control. A sequential measurement strategy is proposed to reduce the number of samples measured in a wafer, yet provide adequate accuracy for the quality feature estimation. A Gaussian process model is used to estimate the true profile of a wafer with improved sensing efficiency. Finally, we study the multistage multimode process monitoring problem. We propose to use PLRTs to inter-relate the variables in a multistage multimode process. A unified charting system is developed. We further study the run length distribution, and optimize the control chart system by considering the modeling uncertainties. Finally, we compare the proposed method with the risk adjustment type of control chart systems based on global regression models, for both simulation study and a wafer manufacturing process.

Production Planning and Control for Semiconductor Wafer Fabrication Facilities

Production Planning and Control for Semiconductor Wafer Fabrication Facilities PDF

Author: Lars Mönch

Publisher: Springer Science & Business Media

Published: 2012-09-14

Total Pages: 298

ISBN-13: 1461444721

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Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more competitive, improving planning and control has become a key factor for business success. This book is devoted to production planning and control problems in semiconductor wafer fabrication facilities. It is the first book that takes a comprehensive look at the role of modeling, analysis, and related information systems for such manufacturing systems. The book provides an operations research- and computer science-based introduction into this important field of semiconductor manufacturing-related research.

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