Thin Films On Silicon: Electronic And Photonic Applications

Thin Films On Silicon: Electronic And Photonic Applications PDF

Author: Vijay Narayanan

Publisher: World Scientific

Published: 2016-08-15

Total Pages: 550

ISBN-13: 9814740497

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This volume provides a broad overview of the fundamental materials science of thin films that use silicon as an active substrate or passive template, with an emphasis on opportunities and challenges for practical applications in electronics and photonics. It covers three materials classes on silicon: Semiconductors such as undoped and doped Si and SiGe, SiC, GaN, and III-V arsenides and phosphides; dielectrics including silicon nitride and high-k, low-k, and electro-optically active oxides; and metals, in particular silicide alloys. The impact of film growth and integration on physical, electrical, and optical properties, and ultimately device performance, is highlighted.

Thin Films on Silicon

Thin Films on Silicon PDF

Author: Vijay Narayanan

Publisher:

Published: 2016

Total Pages: 550

ISBN-13: 9789814740487

DOWNLOAD EBOOK →

"This volume provides a broad overview of the fundamental materials science of thin films that use silicon as an active substrate or passive template, with an emphasis on opportunities and challenges for practical applications in electronics and photonics. It covers three materials classes on silicon: Semiconductors such as undoped and doped Si and SiGe, SiC, GaN, and III-V arsenides and phosphides; dielectrics including silicon nitride and high-k, low-k, and electro-optically active oxides; and metals, in particular silicide alloys. The impact of film growth and integration on physical, electrical, and optical properties, and ultimately device performance, is highlighted."--Publisher's website.

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