Silicide Technology for Integrated Circuits

Silicide Technology for Integrated Circuits PDF

Author: Institution of Electrical Engineers

Publisher: IET

Published: 2004-12-21

Total Pages: 302

ISBN-13: 9780863413520

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This is the first book to provide guidance on the development and application of metal silicide technology as it emerges from the scientific to the prototype and manufacturing stages. Other key topics covered are fundamentals, present and future silicide technology for Si-based devices, and characterisation methods. Suitable for engineers and students in microelectronics.

Technology of Integrated Circuits

Technology of Integrated Circuits PDF

Author: D. Widmann

Publisher: Springer Science & Business Media

Published: 2013-03-09

Total Pages: 355

ISBN-13: 366204160X

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This is the first book to comprehensively record the authors’ authoritative knowledge and practical experience of IC manufacturing, including the tremendous developments of recent years. With its strong application orientation, this is a must-have book for professionals in semiconductor industries.

Semiconducting Silicides

Semiconducting Silicides PDF

Author: Victor E. Borisenko

Publisher: Springer Science & Business Media

Published: 2013-03-07

Total Pages: 362

ISBN-13: 3642596495

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A comprehensive presentation and analysis of properties and methods of formation of semiconducting silicides. Fundamental electronic, optical and transport properties of the silicides collected from recent publications will help readers choose their application in new generations of solid-state devices. A comprehensive presentation of thermodynamic and kinetic data is given in combination with their technical application, as is information on corresponding thin-film or bulk crystal formation techniques.

Silicides for VLSI Applications

Silicides for VLSI Applications PDF

Author: Shyam P. Murarka

Publisher: Academic Press

Published: 2012-12-02

Total Pages: 213

ISBN-13: 0080570569

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Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.

Silicon and Silicide Nanowires

Silicon and Silicide Nanowires PDF

Author: Yu Huang

Publisher: CRC Press

Published: 2016-04-19

Total Pages: 472

ISBN-13: 981430347X

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Nanoscale materials are showing great promise in various electronic, optoelectronic, and energy applications. Silicon (Si) has especially captured great attention as the leading material for microelectronic and nanoscale device applications. Recently, various silicides have garnered special attention for their pivotal role in Si device engineering

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