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Recent Advances in Nanofabrication Techniques and Applications

Author: Bo Cui

Publisher: BoD – Books on Demand

Published: 2011-12-02

Total Pages: 630

ISBN-13: 953307602X

Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.

Recent Advances in Nanofabrication Techniques and Applications

Author: Bo Cui

Publisher: IntechOpen

Published: 2011-12-02

Total Pages: 628

ISBN-13: 9789533076027

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Handbook of Nanofabrication

Author:

Publisher: Academic Press

Published: 2010-05-25

Total Pages: 307

ISBN-13: 0123751772

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Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. Includes chapters covering the most important Nanofabrication techniques, which aids comprehensive understanding of the latest manufacturing technologies encountered in the field of nano-level manufacturing which is essential for preparing for advanced study and application in nanofabrication techniques by enabling thorough understanding of the entire nanofabrication process as it applies to advanced electronic and related manufacturing technologies Each chapter covers a nanofabrication technique comprehensively, which allows the reader to learn to produce nanometer-level products as well as collect, process, and analyze data, improve process parameters, and how to assist engineers in research, development and manufacture of the same Includes contributions from recognized experts from around the globe, making the reader aware of variations in similar techniques applied in different geographical locations and is better positioned to establish all possible global applications

Nanofabrication

Author: Maria Stepanova

Publisher: Springer Science & Business Media

Published: 2011-11-08

Total Pages: 344

ISBN-13: 3709104246

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Intended to update scientists and engineers on the current state of the art in a variety of key techniques used extensively in the fabrication of structures at the nanoscale. The present work covers the essential technologies for creating sub 25 nm features lithographically, depositing layers with nanometer control, and etching patterns and structures at the nanoscale. A distinguishing feature of this book is a focus not on extension of microelectronics fabrication, but rather on techniques applicable for building NEMS, biosensors, nanomaterials, photonic crystals, and other novel devices and structures that will revolutionize society in the coming years.

Novel Optical Technologies for Nanofabrication

Author: Qian Liu

Publisher: Springer Science & Business Media

Published: 2013-10-29

Total Pages: 274

ISBN-13: 3642403875

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Novel Optical Technologies for Nanofabrication describes recent advances made in micro/nanofabrication with super-resolution laser technologies, which are based on the latest research findings in the authors’ groups. It focuses on new techniques and methods as well as applications and development trends in laser nanofabrication, including super-resolution laser direct writing, surface structures composed of laser path-guided wrinkle, three-dimensional laser nanofabrication based on two-photon absorption, and nanofabrication by laser interference and surface plasmon polaritons. This book serves as a reference for academic researchers, engineers, technical professionals and graduate students in the fields of micro/nanotechnology, thin film materials, super-resolution optics and laser techniques. Qian Liu is a Professor at Laboratory for Nanodevice, National Center for Nanoscience and Technology, China. Xuanming Duan is a Professor at the Key Laboratory of Functional Crystals and Laser Technology, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, China Changsi Peng is a Professor at the Institute of Information Optical Engineering, Soochow University, China.

Recent Advances in Nanoscience and Technology

Author: Sunil Kumar Bajpai

Publisher: Bentham Science Publishers

Published: 2009-07

Total Pages: 92

ISBN-13: 160805053X

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"The present Ebook deals with various strategies that have frequently been followed to fabricate nanostructures of required size and shape, and with required functionalities to enable them to be used in a wide spectrum of industrial, biomedical and technol"

Nanofabrication

Author:

Publisher:

Published:

Total Pages:

ISBN-13: 9814476773

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Tip-Based Nanofabrication

Author: Ampere A. Tseng

Publisher: Springer Science & Business Media

Published: 2011-07-25

Total Pages: 468

ISBN-13: 1441998993

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Nanofabrication is critical to the realization of potential benefits in the field of electronics, bioengineering and material science. One enabling technology in nanofabrication is Tip-Based Nanofabrication, which makes use of functionalized micro-cantilevers with nanoscale tips. Tip-Based Nanofabrication: Fundamentals and Applications discusses the development of cantilevered nanotips and how they evolved from scanning probe microscopy and are able to manipulate environments at nanoscale on substrates generating different nanoscale patterns and structures. Also covered are the advantages of ultra-high resolution capability, how to use tip based nanofabrication technology as a tool in the manufacturing of nanoscale structures, single-probe tip technologies, multiple-probe tip methodology, 3-D modeling using tip based nanofabrication and the latest in imaging technology.

Advanced Micro- and Nano-manufacturing Technologies

Author: Shrikrishna Nandkishor Joshi

Publisher: Springer Nature

Published: 2021-10-01

Total Pages: 404

ISBN-13: 9811636451

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This volume focuses on the fundamentals and advancements in micro and nanomanufacturing technologies applied in the biomedical and biochemical domain. The contents of this volume provide comprehensive coverage of the physical principles of advanced manufacturing technologies and the know-how of their applications in the fabrication of biomedical devices and systems. The book begins by documenting the journey of miniaturization and micro-and nano-fabrication. It then delves into the fundamentals of various advanced technologies such as micro-wire moulding, 3D printing, lithography, imprinting, direct laser machining, and laser-induced plasma-assisted machining. It also covers laser-based technologies which are a promising option due to their flexibility, ease in control and application, high precision, and availability. These technologies can be employed to process several materials such as glass, polymers: polycarbonate, polydimethylsiloxane, polymethylmethacrylate, and metals such as stainless steel, which are commonly used in the fabrication of biomedical devices, such as microfluidic technology, optical and fiber-optic sensors, and electro-chemical bio-sensors. It also discusses advancements in various MEMS/NEMS based technologies and their applications in energy conversion and storage devices. The chapters are written by experts from the fields of micro- and nano-manufacturing, materials engineering, nano-biotechnology, and end-users such as clinicians, engineers, academicians of interdisciplinary background. This book will be a useful guide for academia and industry alike.

Scanning Microscopy for Nanotechnology

Author: Weilie Zhou

Publisher: Springer Science & Business Media

Published: 2007-03-09

Total Pages: 533

ISBN-13: 0387396209

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This book presents scanning electron microscopy (SEM) fundamentals and applications for nanotechnology. It includes integrated fabrication techniques using the SEM, such as e-beam and FIB, and it covers in-situ nanomanipulation of materials. The book is written by international experts from the top nano-research groups that specialize in nanomaterials characterization. The book will appeal to nanomaterials researchers, and to SEM development specialists.