Production Planning and Control for Semiconductor Wafer Fabrication Facilities

Production Planning and Control for Semiconductor Wafer Fabrication Facilities PDF

Author: Lars Mönch

Publisher: Springer Science & Business Media

Published: 2012-09-12

Total Pages: 298

ISBN-13: 1461444713

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Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more competitive, improving planning and control has become a key factor for business success. This book is devoted to production planning and control problems in semiconductor wafer fabrication facilities. It is the first book that takes a comprehensive look at the role of modeling, analysis, and related information systems for such manufacturing systems. The book provides an operations research- and computer science-based introduction into this important field of semiconductor manufacturing-related research.

Production Planning and Control for Semiconductor Wafer Fabrication Facilities

Production Planning and Control for Semiconductor Wafer Fabrication Facilities PDF

Author: Lars Mönch

Publisher: Springer Science & Business Media

Published: 2012-09-14

Total Pages: 298

ISBN-13: 1461444721

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Over the last fifty-plus years, the increased complexity and speed of integrated circuits have radically changed our world. Today, semiconductor manufacturing is perhaps the most important segment of the global manufacturing sector. As the semiconductor industry has become more competitive, improving planning and control has become a key factor for business success. This book is devoted to production planning and control problems in semiconductor wafer fabrication facilities. It is the first book that takes a comprehensive look at the role of modeling, analysis, and related information systems for such manufacturing systems. The book provides an operations research- and computer science-based introduction into this important field of semiconductor manufacturing-related research.

Handbook of Production Scheduling

Handbook of Production Scheduling PDF

Author: Jeffrey W. Herrmann

Publisher: Springer Science & Business Media

Published: 2006-08-18

Total Pages: 331

ISBN-13: 0387331174

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This book concentrates on real-world production scheduling in factories and industrial settings. It includes industry case studies that use innovative techniques as well as academic research results that can be used to improve production scheduling. Its purpose is to present scheduling principles, advanced tools, and examples of innovative scheduling systems to persons who could use this information to improve their own production scheduling.

Fundamentals of Semiconductor Manufacturing and Process Control

Fundamentals of Semiconductor Manufacturing and Process Control PDF

Author: Gary S. May

Publisher: John Wiley & Sons

Published: 2006-05-26

Total Pages: 428

ISBN-13: 0471790273

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A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Production Planning with Capacitated Resources and Congestion

Production Planning with Capacitated Resources and Congestion PDF

Author: Hubert Missbauer

Publisher: Springer Nature

Published: 2020-02-26

Total Pages: 289

ISBN-13: 107160354X

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This book presents a comprehensive overview of recent developments in production planning. The monograph begins with an introductory chapter reviewing the need for these production planning models, that operate by determining time-phased releases of work into the facility or supply chain, relating these to the Manufacturing Planning and Control (MPC) and Advanced Planning and Scheduling (APS) frameworks, that form the basis of most academic research and industrial practice. The extensive body of work on Workload Control is also placed in this context, and proves the need for improved models with a discussion of the difficulties, these approaches encounter. The next two chapters present a detailed review of the state of the art in optimization models based on exogenous planned lead times, and examines the cases where these can take both integer and fractional values. The difficulties arising in estimating planned lead times are consistent with factory behavior which are highlighted, noting that many of these lead to non-convex optimization models. Attempts to address these difficulties by iterative multimodel approaches, that combine simulation and mathematical programming, are also discussed in detail. The next three chapters of the volume address the set of techniques developed using clearing functions, which represent the expected output of a resource in a planning period, as a function of the expected workload of the resource, during that period. The chapters on this subject propose a basic optimization model for multiple products, discuss the difficulties of this model and some possible solutions. It also reviews prior work, and discuss a number of alternative formulations of the clearing function concept with their respective advantages and disadvantages. Applications to lot sizing decisions and a number of other specific problems are also described. This volume concludes with an assessment of the state of the art described in the volume, and several directions for future work.

Run-to-Run Control in Semiconductor Manufacturing

Run-to-Run Control in Semiconductor Manufacturing PDF

Author: James Moyne

Publisher: CRC Press

Published: 2018-10-08

Total Pages: 368

ISBN-13: 1420040669

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Run-to-run (R2R) control is cutting-edge technology that allows modification of a product recipe between machine "runs," thereby minimizing process drift, shift, and variability-and with them, costs. Its effectiveness has been demonstrated in a variety of processes, such as vapor phase epitaxy, lithography, and chemical mechanical planarization. The only barrier to the semiconductor industry's widespread adoption of this highly effective process control is a lack of understanding of the technology. Run to Run Control in Semiconductor Manufacturing overcomes that barrier by offering in-depth analyses of R2R control.

Multi-Agent-Based Production Planning and Control

Multi-Agent-Based Production Planning and Control PDF

Author: Jie Zhang

Publisher: John Wiley & Sons

Published: 2017-08-28

Total Pages: 420

ISBN-13: 111889006X

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At the crossroads of artificial intelligence, manufacturing engineering, operational research and industrial engineering and management, multi-agent based production planning and control is an intelligent and industrially crucial technology with increasing importance. This book provides a complete overview of multi-agent based methods for today’s competitive manufacturing environment, including the Job Shop Manufacturing and Re-entrant Manufacturing processes. In addition to the basic control and scheduling systems, the author also highlights advance research in numerical optimization methods and wireless sensor networks and their impact on intelligent production planning and control system operation. Enables students, researchers and engineers to understand the fundamentals and theories of multi-agent based production planning and control Written by an author with more than 20 years’ experience in studying and formulating a complete theoretical system in production planning technologies Fully illustrated throughout, the methods for production planning, scheduling and controlling are presented using experiments, numerical simulations and theoretical analysis Comprehensive and concise, Multi-Agent Based Production Planning and Control is aimed at the practicing engineer and graduate student in industrial engineering, operational research, and mechanical engineering. It is also a handy guide for advanced students in artificial intelligence and computer engineering.

Mems/Nems

Mems/Nems PDF

Author: Cornelius T. Leondes

Publisher: Springer Science & Business Media

Published: 2007-10-08

Total Pages: 2142

ISBN-13: 0387257861

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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Integration of Process Planning and Scheduling

Integration of Process Planning and Scheduling PDF

Author: Rakesh Kumar Phanden

Publisher: CRC Press

Published: 2019-10-16

Total Pages: 259

ISBN-13: 0429664729

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Both process planning and scheduling are very important functions of manufacturing, which affect together the cost to manufacture a product and the time to deliver it. This book contains various approaches proposed by researchers to integrate the process planning and scheduling functions of manufacturing under varying configurations of shops. It is useful for both beginners and advanced researchers to understand and formulate the Integration Process Planning and Scheduling (IPPS) problem effectively. Features Covers the basics of both process planning and scheduling Presents nonlinear approaches, closed-loop approaches, as well as distributed approaches Discuss the outfit of IPPS in Industry 4.0 paradigm Includes the benchmarking problems on IPPS Contains nature-algorithms and metaheuristics for performance measurements in IPPS Presents analysis of energy-efficient objective for sustainable manufacturing in IPPS

Semiconductor Industry

Semiconductor Industry PDF

Author: J. Michael Sherer

Publisher: CRC Press

Published: 2018-10-03

Total Pages: 216

ISBN-13: 1420027190

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Given the myriad exhaust compounds and the corresponding problems that they can pose in an exhaust management system, the proper choice of such systems is a complex task. Presenting the fundamentals, technical details, and general solutions to real-world problems, Semiconductor Industry: Wafer Fab Exhaust Management offers practical guidance on selecting an appropriate system for a given application. Using examples that provide a clear understanding of the concepts discussed, Sherer covers facility layout, support facilities operations, and semiconductor process equipment, followed by exhaust types and challenges. He reviews exhaust point-of-use devices and exhaust line requirements needed between process equipment and the centralized exhaust system. The book includes information on wet scrubbers for a centralized acid exhaust system and a centralized ammonia exhaust system and on centralized equipment to control volatile organic compounds. It concludes with a chapter devoted to emergency releases and a separate chapter of examples illustrating these systems in use. Drawing on the author's 20 years of industry experience, the book shows you how to customize strategies specific to your needs, solve current problems, and prevent future issues in your exhaust management systems.