Predictive Simulation of Semiconductor Processing

Predictive Simulation of Semiconductor Processing PDF

Author: Jarek Dabrowski

Publisher: Springer Science & Business Media

Published: 2013-03-09

Total Pages: 505

ISBN-13: 3662094320

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Predictive Simulation of Semiconductor Processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

Computational Modeling in Semiconductor Processing

Computational Modeling in Semiconductor Processing PDF

Author: M. Meyyappan

Publisher: Artech House Publishers

Published: 1995

Total Pages: 388

ISBN-13:

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This book provides you with in-depth coverage of the models, governing equations, and numerical techniques suitable for process simulation -- so you can give your designs the competitive edge. You will understand the basic principles of transport phenomena, gas phase, and surface reactions in electronics material processing, and learn practical numerical techniques used in process simulations.

Fundamentals of Semiconductor Manufacturing and Process Control

Fundamentals of Semiconductor Manufacturing and Process Control PDF

Author: Gary S. May

Publisher: John Wiley & Sons

Published: 2006-05-26

Total Pages: 428

ISBN-13: 0471790273

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A practical guide to semiconductor manufacturing from processcontrol to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Controlcovers all issues involved in manufacturing microelectronic devicesand circuits, including fabrication sequences, process control,experimental design, process modeling, yield modeling, and CIM/CAMsystems. Readers are introduced to both the theory and practice ofall basic manufacturing concepts. Following an overview of manufacturing and technology, the textexplores process monitoring methods, including those that focus onproduct wafers and those that focus on the equipment used toproduce wafers. Next, the text sets forth some fundamentals ofstatistics and yield modeling, which set the foundation for adetailed discussion of how statistical process control is used toanalyze quality and improve yields. The discussion of statistical experimental design offers readers apowerful approach for systematically varying controllable processconditions and determining their impact on output parameters thatmeasure quality. The authors introduce process modeling concepts,including several advanced process control topics such asrun-by-run, supervisory control, and process and equipmentdiagnosis. Critical coverage includes the following: * Combines process control and semiconductor manufacturing * Unique treatment of system and software technology and managementof overall manufacturing systems * Chapters include case studies, sample problems, and suggestedexercises * Instructor support includes electronic copies of the figures andan instructor's manual Graduate-level students and industrial practitioners will benefitfrom the detailed exami?nation of how electronic materials andsupplies are converted into finished integrated circuits andelectronic products in a high-volume manufacturingenvironment. An Instructor's Manual presenting detailed solutions to all theproblems in the book is available from the Wiley editorialdepartment. An Instructor Support FTP site is also available.

Reliability Engineering

Reliability Engineering PDF

Author: Elsayed A. Elsayed

Publisher: John Wiley & Sons

Published: 2021-01-07

Total Pages: 930

ISBN-13: 1119665922

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Get a firm handle on the engineering reliability process with this insightful and complete resource Named one of the Best Industrial Management eBooks of All Time by BookAuthority As featured on CNN, Forbes and Inc – BookAuthority identifies and rates the best books in the world, based on recommendations by thought leaders and experts The newly and thoroughly revised 3rd Edition of Reliability Engineering delivers a comprehensive and insightful analysis of this crucial field. Accomplished author, professor, and engineer, Elsayed. A. Elsayed includes new examples and end-of-chapter problems to illustrate concepts, new chapters on resilience and the physics of failure, revised chapters on reliability and hazard functions, and more case studies illustrating the approaches and methodologies described within. The book combines analyses of system reliability estimation for time independent and time dependent models with the construction of the likelihood function and its use in estimating the parameters of failure time distribution. It concludes by addressing the physics of failures, mechanical reliability, and system resilience, along with an explanation of how to ensure reliability objectives by providing preventive and scheduled maintenance and warranty policies. This new edition of Reliability Engineering covers a wide range of topics, including: Reliability and hazard functions, like the Weibull Model, the Exponential Model, the Gamma Model, and the Log-Logistic Model, among others System reliability evaluations, including parallel-series, series-parallel, and mixed parallel systems The concepts of time- and failure-dependent reliability within both repairable and non-repairable systems Parametric reliability models, including types of censoring, and the Exponential, Weibull, Lognormal, Gamma, Extreme Value, Half-Logistic, and Rayleigh Distributions Perfect for first-year graduate students in industrial and systems engineering, Reliability Engineering, 3rd Edition also belongs on the bookshelves of practicing professionals in research laboratories and defense industries. The book offers a practical and approachable treatment of a complex area, combining the most crucial foundational knowledge with necessary and advanced topics.

The Theory of Laser Materials Processing

The Theory of Laser Materials Processing PDF

Author: John Dowden

Publisher: Springer Science & Business Media

Published: 2009-01-06

Total Pages: 396

ISBN-13: 1402093403

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The purpose of this book is to show how general principles afford insight into laser processes. The principles may be from fundamental physical theory or from direct observation, but understanding of the general characteristics of a process is essential.

Data-Driven Scheduling of Semiconductor Manufacturing Systems

Data-Driven Scheduling of Semiconductor Manufacturing Systems PDF

Author: Li Li

Publisher: Springer Nature

Published: 2023-05-20

Total Pages: 276

ISBN-13: 9811975884

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This book systematically discusses the intelligent scheduling problem of complex semiconductor manufacturing systems from theory to method and then to application. The main contents include data-driven scheduling framework of semiconductor manufacturing system, data preprocessing of semiconductor manufacturing system, correlation analysis of performance index of semiconductor production line, intelligent release control strategy, dynamic dispatching rules simulating pheromone mechanism, and load balancing dynamic scheduling of semiconductor production line, performance index-driven dynamic scheduling method of semiconductor production line, scheduling trend of semi-conductor manufacturing system in big data environment. This book aims to provide readers with valuable reference and assistance in the theoretical methods, techniques, and application cases of semiconductor manufacturing systems and their intelligent scheduling.

Chemical-Mechanical Planarization of Semiconductor Materials

Chemical-Mechanical Planarization of Semiconductor Materials PDF

Author: M.R. Oliver

Publisher: Springer Science & Business Media

Published: 2013-03-14

Total Pages: 432

ISBN-13: 3662062348

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This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.

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