Optical MEMS
Author: Huikai Xie
Publisher: MDPI
Published: 2019-08-06
Total Pages: 176
ISBN-13: 3039213032
DOWNLOAD EBOOK →This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines
Author: Huikai Xie
Publisher: MDPI
Published: 2019-08-06
Total Pages: 176
ISBN-13: 3039213032
DOWNLOAD EBOOK →This book is a printed edition of the Special Issue Optical MEMS that was published in Micromachines
Author: Guangya Zhou
Publisher: CRC Press
Published: 2017-12-14
Total Pages: 622
ISBN-13: 1351647601
DOWNLOAD EBOOK →This book covers device design fundamentals and system applications in optical MEMS and nanophotonics. Expert authors showcase examples of how fusion of nanoelectromechanical (NEMS) with nanophotonic elements is creating powerful new photonic devices and systems including MEMS micromirrors, MEMS tunable filters, MEMS-based adjustable lenses and apertures, NEMS-driven variable silicon nanowire waveguide couplers, and NEMS tunable photonic crystal nanocavities. The book also addresses system applications in laser scanning displays, endoscopic systems, space telescopes, optical telecommunication systems, and biomedical implantable systems. Presents efforts to scale down mechanical and photonic elements into the nano regime for enhanced performance, faster operational speed, greater bandwidth, and higher level of integration. Showcases the integration of MEMS and optical/photonic devices into real commercial products. Addresses applications in optical telecommunication, sensing, imaging, and biomedical systems. Prof. Vincent C. Lee is Associate Professor in the Department of Electrical and Computer Engineering, National University of Singapore. Prof. Guangya Zhou is Associate Professor in the Department of Mechanical Engineering at National University of Singapore.
Author: P. Rai-Choudhury
Publisher: SPIE Press
Published: 2000
Total Pages: 544
ISBN-13: 9780819437167
DOWNLOAD EBOOK →The silicon age that led the computer revolution has significantly changed the world. The next 30 years will see the incorporation of new types of functionality onto the chip-structures that will enable the chip to reason, to sense, to act and to communicate. Micromachining technologies offer a wide range of possibilities for active and passive devices. Recent developments have produced sensors, actuators and optical systems. Many of these technologies are based on surface micromachining, which has evolved from silicon integrated circuit technology. This book is written by experts in the field. It contains useful details in design and processing and can be utilized as a reference book or as a textbook.
Author: Ville Kaajakari
Publisher:
Published: 2009
Total Pages: 478
ISBN-13: 9780982299104
DOWNLOAD EBOOK →Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered. Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications. MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.
Author: Celestine Iwendi
Publisher: Frontiers Media SA
Published: 2023-04-17
Total Pages: 1365
ISBN-13: 2832515754
DOWNLOAD EBOOK →Author: Hiroo Ukita
Publisher: Springer Science & Business Media
Published: 2007-04-14
Total Pages: 259
ISBN-13: 3540313729
DOWNLOAD EBOOK →This is the most comprehensive book on the basics, realization and applications of micromechanical photonics. Its purpose is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics. It does this not only through theoretical and experimental results, but also by describing various products and their fields of application.
Author: Jan Korvink
Publisher: Springer Science & Business Media
Published: 2010-05-28
Total Pages: 981
ISBN-13: 3540336559
DOWNLOAD EBOOK →A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
Author: Victor M. Bright
Publisher: SPIE-International Society for Optical Engineering
Published: 1999
Total Pages: 654
ISBN-13:
DOWNLOAD EBOOK →A selection of 81 papers on six major topics within the field of optical microelectromechanical systems (MEMS).
Author: Nazmul Islam
Publisher: BoD – Books on Demand
Published: 2012-03-28
Total Pages: 496
ISBN-13: 9535103067
DOWNLOAD EBOOK →The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.
Author: Huikai Xie
Publisher: MDPI
Published: 2018-05-04
Total Pages: 217
ISBN-13: 3038428671
DOWNLOAD EBOOK →This book is a printed edition of the Special Issue "MEMS Mirrors" that was published in Micromachines