Micromechanical Sensors, Actuators, and Systems
Author: D. Cho
Publisher: American Society of Mechanical Engineers
Published: 1991
Total Pages: 376
ISBN-13:
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Micro Mechanical Systems
Author: T. Fukuda
Publisher: Elsevier
Published: 1998-07-24
Total Pages: 278
ISBN-13: 0080536549
DOWNLOAD EBOOK →In ten sections this book describes the principles and technology of Micro Mechanical Systems. Section one is a general introduction to the historical background and the parallels to microelectronics, reviewing the motivation for microsystems, and discussing microphysics and design and the evolution from microcomponents to microsystems. Section two covers the areas of photolithographic microfabrication, basic concepts of planar processing, materials, and processes. Section three looks at micromachining by machine tools, its history, basic principles and preparation methods. Section four discusses tribological aspects of microsystems. Section five covers fabrication, performance and examples of silicon microsensors. Section six looks at electric and magnetic micro-actuators for micro-robots. Section seven covers energy source and power supply methods. Section eight covers controlling principles and methods of micro mechanical systems and section nine gives examples of microsystems and micromachines. The final section discusses the future problems and outlook of micro mechanical systems.
Analysis and Design Principles of MEMS Devices
Author: Minhang Bao
Publisher: Elsevier
Published: 2005-04-12
Total Pages: 327
ISBN-13: 008045562X
DOWNLOAD EBOOK →Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS devices have been developed and many mass produced, but the information on these is widely dispersed in the literature. This book presents the analysis and design principles of MEMS devices. The information is comprehensive, focusing on microdynamics, such as the mechanics of beam and diaphragm structures, air damping and its effect on the motion of mechanical structures. Using practical examples, the author examines problems associated with analysis and design, and solutions are included at the back of the book. The ideal advanced level textbook for graduates, Analysis and Design Principles of MEMS Devices is a suitable source of reference for researchers and engineers in the field. * Presents the analysis and design principles of MEMS devices more systematically than ever before. * Includes the theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures * A problem section is included at the end of each chapter with answers provided at the end of the book.
Precision Sensors, Actuators and Systems
Author: H.S. Tzou
Publisher: Springer Science & Business Media
Published: 2012-12-06
Total Pages: 478
ISBN-13: 9401118183
DOWNLOAD EBOOK →Research into and development of high-precision systems, microelectromechanical systems, distributed sensors/actuators, smart structural systems, high-precision controls, etc. have drawn much attention in recent years. These new devices and systems will bring about a new technical revolution in modern industries and impact future human life. This book presents a unique overview of these technologies such as silicon based sensors/actuators and control piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fiber sensors/systems, etc. These are four essential subjects emphasized in the book: 1. Survey of the (current) research and development; 2. Fundamental theories and tools; 3. Practical applications. 4. Outlining future research and development.
MEMS Mechanical Sensors
Author: Stephen Beeby
Publisher: Artech House
Published: 2004
Total Pages: 269
ISBN-13: 1580535364
DOWNLOAD EBOOK →Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.
Mems/Nems
Author: Cornelius T. Leondes
Publisher: Springer Science & Business Media
Published: 2007-10-08
Total Pages: 2142
ISBN-13: 0387257861
DOWNLOAD EBOOK →This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Sensors, Actuators, and Their Interfaces
Author:
Publisher:
Published: 2018-05
Total Pages: 366
ISBN-13: 9781642241679
DOWNLOAD EBOOK →Since 1987, micro-electro-mechanical-systems (MEMS) has advanced from the early stage of technology development, device exploration, and laboratory research, to the mature stage of quantity production, practical applications, and expanding to many new areas of exploration and research. Such devices are fabricated using a wide range of technologies, having in common the ability to create structures with micro- and even nanometer accuracies. The products range in size from a few micrometers to millimeters. These devices have the ability to sense, control and actuate on the micro scale, and generate effects on the macro scale. Demands for microelectromechanical systems (MEMS) are continuously growing and it is predicted that they will continue to grow for, at least, a few more decadesRecent advances of sensor technologies have been powered by high-speed and low-cost electronic circuits, novel signal processing methods, and advanced manufacturing technologies. The synergetic interaction of new developments in these fields provides promising technical solutions increasing the quality, reliability, and economic efficiency of technical products. This book 'Sensors, Actuators, and their Interfaces' brings together interdisciplinary information dedicated to research and development in the field of sensors, actuators and micro-systems. It includes research papers, reviews on complete sensor and actuator networks dealing with operating systems and network hardware for sensor and actuator networks, principles and applications of sensors and actuators, crossing multiple disciplines including aerospace, biomedical, chemical, civil, electrical, and mechanical engineering. This book will serve as valuable guide to the students, practitioners, researchers and the planners of MEMS development to stimulate more valuable discussions and studies.
Mechanical Microsensors
Author: M. Elwenspoek
Publisher: Springer Science & Business Media
Published: 2012-12-06
Total Pages: 306
ISBN-13: 3662043211
DOWNLOAD EBOOK →This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
An Introduction to Microelectromechanical Systems Engineering
Author: Nadim Maluf
Publisher: Artech House
Published: 2004
Total Pages: 312
ISBN-13: 9781580535915
DOWNLOAD EBOOK →Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, and manufacturing, and learn how it is being applied in industrial, optical, medical and electronic markets. The second edition features brand new sections on RF MEMS, photo MEMS, micromachining on materials other than silicon, reliability analysis, plus an expanded reference list. With an emphasis on commercialized products, this unique resource helps you determine whether your application can benefit from a MEMS solution, understand how other applications and companies have benefited from MEMS, and select and define a manufacturable MEMS process for your application. You discover how to use MEMS technology to enable new functionality, improve performance, and reduce size and cost. The book teaches you the capabilities and limitations of MEMS devices and processes, and helps you communicate the relative merits of MEMS to your company's management. From critical discussions on design operation and process fabrication of devices and systems, to a thorough explanation of MEMS packaging, this easy-to-understand book clearly explains the basics of MEMS engineering, making it an invaluable reference for your work in the field.
Micro Electro Mechanical Systems
