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X-Ray Metrology in Semiconductor Manufacturing

Author: D. Keith Bowen

Publisher: CRC Press

Published: 2018-10-03

Total Pages: 296

ISBN-13: 1420005650

The scales involved in modern semiconductor manufacturing and microelectronics continue to plunge downward. Effective and accurate characterization of materials with thicknesses below a few nanometers can be achieved using x-rays. While many books are available on the theory behind x-ray metrology (XRM), X-Ray Metrology in Semiconductor Manufacturing is the first book to focus on the practical aspects of the technology and its application in device fabrication and solving new materials problems. Following a general overview of the field, the first section of the book is organized by application and outlines the techniques that are best suited to each. The next section delves into the techniques and theory behind the applications, such as specular x-ray reflectivity, diffraction imaging, and defect mapping. Finally, the third section provides technological details of each technique, answering questions commonly encountered in practice. The authors supply real examples from the semiconductor and magnetic recording industries as well as more than 150 clearly drawn figures to illustrate the discussion. They also summarize the principles and key information about each method with inset boxes found throughout the text. Written by world leaders in the field, X-Ray Metrology in Semiconductor Manufacturing provides real solutions with a focus on accuracy, repeatability, and throughput.

Applied Metrology for Manufacturing Engineering

Author: Ammar Grous

Publisher: John Wiley & Sons

Published: 2013-03-04

Total Pages: 570

ISBN-13: 1118622596

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Applied Metrology for Manufacturing Engineering, stands out from traditional works due to its educational aspect. Illustrated by tutorials and laboratory models, it is accessible to users of non-specialists in the fields of design and manufacturing. Chapters can be viewed independently of each other. This book focuses on technical geometric and dimensional tolerances as well as mechanical testing and quality control. It also provides references and solved examples to help professionals and teachers to adapt their models to specific cases. It reflects recent developments in ISO and GPS standards and focuses on training that goes hand in hand with the progress of practical work and workshops dealing with measurement and dimensioning.

Metrology in Industry

Author: French College of Metrology

Publisher: John Wiley & Sons

Published: 2013-03-01

Total Pages: 187

ISBN-13: 1118614941

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Metrology is an integral part of the structure of today’s world: navigation and telecommunications require highly accurate time and frequency standards; human health and safety relies on authoritative measurements in diagnosis and treatment, as does food production and trade; global climate studies also depend on reliable and consistent data. Moreover, international trade practices increasingly require institutions to display demonstrated conformity to written standards and specifications. As such, having relevant and reliable results of measurements and tests in compliance with mutually recognised standards can be a technical, commercial and statutory necessity for a company. This book, the results of a working group from the French College of Metrology and featuring chapters written by a range of experts from a variety of European countries, gives a comprehensive and international treatment of the subject. Academics involved in metrology as well as people involved in the metrology capacities of companies and institutions will find this book of great interest.

Industrial Metrology

Author: Graham T. Smith

Publisher: Springer Science & Business Media

Published: 2013-04-17

Total Pages: 336

ISBN-13: 1447138147

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The subject of this book is surface metrology, in particular two major aspects: surface texture and roundness. It has taken a long time for manufacturing engineers and designers to realise the usefulness of these features in quality of conformance and quality of design. Unfortunately this awareness has come at a time when engineers versed in the use and specification of surfaces are at a premium. Traditionally surface metrology usage has been dictated by engineers who have served long and demanding apprenticeships, usually in parallel with studies leading to technician-level qualifications. Such people understood the processes and the achievable accuracies of machine tools, thereby enabling them to match production capability with design requirements. This synergy, has been made possible by the understanding of adherence to careful metrological procedures and a detailed knowledge of surface measuring instruments and their operation, in addition to wider inspection room techniques. With the demise in the UK of polytechnics and technical colleges, this source of skilled technicians has all but dried up. The shortfall has been made up of semi skilled craftsmen, or inexperienced graduates who cannot be expected to satisfy tradition al or new technology needs. Miniaturisation, for example, has had a pro found effect. Engineering parts are now routinely being made with nanometre surface texture and fiatness. At these molecular and atomic scales, the engineer has to be a physicist.

Optical Metrology

Author: Olivério D.D. Soares

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 794

ISBN-13: 9400936095

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Optical Metrology is a rapidly expanding field i'n both its scientific foundations and technological developments, being of major concern to measurements, quality control, non-destructive tes ting and in fundamental research. In order to define the state-of-the-art, and to evaluate pre sent accomplishments, whilst giving an appraisal of how each of the particular topics will evolve the Optical Metrology-anAdvancedStudy Institute was organized with a concourse of the world's acknowledged experts. Thus, the Institute provided a forum for tutorial reviews blended with topics of current research in the form of a progressive and comprehensive presentation of recent promising developments, lea ding techniques and instrumentation in incoherent and coherent optics for Metrology, Sensing and Control in Science, Industry and Biomedici ne. Optical Metrology is a very broad field which is highly inter disciplinary in its applications, and in its scientific and technolo gical background. It is related to such diverse disciplines as physi cal and chemical sciences, engineering, electronics, computer scien ces, biological sciences and theoretical sciences, such as statistics. Although there was an emphasis on photomechanics and industri al applications, a marked diversity was reflected in the different background and interests of the participants. The vitality and viabi lity of the discipline was enhanced not only by the encouraging number of young scientists and industrialists participating and authoring, but also by the remarkably promising prospects found in x the practical applications supported by advanced electronic hybridi zation.

Engineering Metrology and Measurements

Author: Raghavendra,

Publisher: OUP India

Published: 2013-05

Total Pages: 0

ISBN-13: 9780198085492

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Engineering Metrology and Measurements is a textbook designed for students of mechanical, production and allied disciplines to facilitate learning of various shop-floor measurement techniques and also understand the basics of mechanical measurements.

Unit Manufacturing Processes

Author: National Research Council

Publisher: National Academies Press

Published: 1995-01-03

Total Pages: 228

ISBN-13: 0309176670

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Manufacturing, reduced to its simplest form, involves the sequencing of product forms through a number of different processes. Each individual step, known as an unit manufacturing process, can be viewed as the fundamental building block of a nation's manufacturing capability. A committee of the National Research Council has prepared a report to help define national priorities for research in unit processes. It contains an organizing framework for unit process families, criteria for determining the criticality of a process or manufacturing technology, examples of research opportunities, and a prioritized list of enabling technologies that can lead to the manufacture of products of superior quality at competitive costs. The study was performed under the sponsorship of the National Science Foundation and the Defense Department's Manufacturing Technology Program.

Handbook of Industrial Metrology

Author: American Society of Tool and Manufacturing Engineers

Publisher:

Published: 1967

Total Pages: 520

ISBN-13:

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Industrial Moisture and Humidity Measurement

Author: Roland Wernecke

Publisher: John Wiley & Sons

Published: 2013-12-18

Total Pages: 476

ISBN-13: 3527652434

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Moisture analysis covers a variety of methods for measuring high levels of moisture, as well as trace amounts, in solids, liquids, or gases. There are many applications where trace moisture measurements are indispensable for manufacturing and for process quality assurance. Trace moisture in solids must be controlled for plastics, pharmaceuticals and heat treatment processes. Measurement applications in gases and liquids include, for example, drying processes, hydrocarbon processing, pure gases in the semiconductor industry, natural gas pipeline transport, the conditioning of food and other products. Written by experts with over 20 years of experience in the field, this one-stop guide covers all aspects of these measurements, including both the theory and a wealth of practical know-how. As such, it includes guidelines on installation, on the realization of standards for absolute and relative humidity, verification and traceability measurements, equipment calibration methods and the latest research developments. Backed by numerous case studies, this practical book serves the needs of those working in the industry tasked with performing or developing new techniques and processes for moisture and humidity measurement. As a result, the scientist or engineer has all the information required for accurate, reliable, economically viable and efficient moisture measurement.

Advances in Manufacturing II

Author: Magdalena Diering

Publisher: Springer

Published: 2019-05-09

Total Pages: 298

ISBN-13: 9783030186814

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This book gathers timely contributions on metrology and measurement systems, across different disciplines and field of applications. The chapters, which were presented at the 6th International Scientific-Technical Conference, MANUFACTURING 2019, held on May 19-21, 2019, in Poznan, Poland, cover cutting-edge topics in surface metrology, biology, chemistry, civil engineering, food science, material science, mechanical engineering, manufacturing, metrology, nanotechnology, physics, tribology, quality engineering, computer science, among others. By bringing together engineering and economic topics, the book is intended as an extensive, timely and practice-oriented reference guide for both researchers and practitioners. It is also expected to foster better communication and closer cooperation between universities and their business and industry partners.