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MEMS: Field Models and Optimal Design

Author: Paolo Di Barba

Publisher: Springer

Published: 2019-06-26

Total Pages: 190

ISBN-13: 3030214966

This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models. The book shows how the combination of automated optimal design and field-based models can produce powerful design toolboxes for MEMS. It especially focuses on illustrating theoretical concepts with practical examples, fostering comprehension through a problem-solving approach. By comparing the results obtained using different methods, readers will learn to identify their respective strengths and weaknesses. In addition, special emphasis is given to evolutionary computing and nature-inspired optimization strategies, the effectiveness of which has already been amply demonstrated. Given its scope, the book provides PhD students, researchers and professionals in the area of computer-aided analysis with a comprehensive, yet concise and practice-oriented guide to MEMS design and optimization. To benefit most from the book, readers should have a basic grasp of electromagnetism, vector analysis and numerical methods.

Optimal Synthesis Methods for MEMS

Author: G. K. Ananthasuresh

Publisher: Springer Science & Business Media

Published: 2003-11-30

Total Pages: 346

ISBN-13: 9781402076206

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This book is a first ever collection of optimization-based synthesis methods for MEMS. Various chapters written by leading researchers in the field cover a variety of MEMS devices and actuation principles including mechanical, electrostatic, electro-thermal, and piezoelectric. Process, mask, and system-level syntheses are also addressed. Sufficient background material, algorithms, and details of implementation of the optimization procedures are included to facilitate application to practical problems by MEMS engineers and researchers as well as students. This timely book underscores the importance of synthesis in designing MEMS efficiently and economically.

System-level Modeling of MEMS

Author: Oliver Brand

Publisher: John Wiley & Sons

Published: 2012-12-20

Total Pages: 562

ISBN-13: 3527647120

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System-level modeling of MEMS - microelectromechanical systems - comprises integrated approaches to simulate, understand, and optimize the performance of sensors, actuators, and microsystems, taking into account the intricacies of the interplay between mechanical and electrical properties, circuitry, packaging, and design considerations. Thereby, system-level modeling overcomes the limitations inherent to methods that focus only on one of these aspects and do not incorporate their mutual dependencies. The book addresses the two most important approaches of system-level modeling, namely physics-based modeling with lumped elements and mathematical modeling employing model order reduction methods, with an emphasis on combining single device models to entire systems. At a clearly understandable and sufficiently detailed level the readers are made familiar with the physical and mathematical underpinnings of MEMS modeling. This enables them to choose the adequate methods for the respective application needs. This work is an invaluable resource for all materials scientists, electrical engineers, scientists working in the semiconductor and/or sensor industry, physicists, and physical chemists.

Computational Methods for the Innovative Design of Electrical Devices

Author: Slawomir Wiak

Publisher: Springer Science & Business Media

Published: 2010-10-29

Total Pages: 378

ISBN-13: 364216224X

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Computational Methods for the Innovative Design of Electrical Devices is entirely focused on the optimal design of various classes of electrical devices. Emerging new methods, like e.g. those based on genetic algorithms, are presented and applied in the design optimization of different devices and systems. Accordingly, the solution to field analysis problems is based on the use of finite element method, and analytical methods as well. An original aspect of the book is the broad spectrum of applications in the area of electrical engineering, especially electrical machines. This way, traditional design criteria of conventional devices are revisited in a critical way, and some innovative solutions are suggested. In particular, the optimization procedures developed are oriented to three main aspects: shape design, material properties identification, machine optimal behaviour. Topics covered include: • New parallel finite-element solvers • Response surface method • Evolutionary computing • Multiobjective optimization • Swarm intelligence • MEMS applications • Identification of magnetic properties of anisotropic laminations • Neural networks for non-destructive testing • Brushless DC motors, transformers • Permanent magnet disc motors, magnetic separators • Magnetic levitation systems

Micro Process Engineering

Author: Norbert Kockmann

Publisher: John Wiley & Sons

Published: 2013-03-26

Total Pages: 529

ISBN-13: 3527675051

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This edition of 'Micro Process Engineering' was originally published in the successful series 'Advanced Micro & Nanosystems'. Authors from leading industrial players and research institutions present a concise and didactical introduction to Micro Process Engineering, the combination of microtechnology and process engineering into a most promising and powerful tool for revolutionizing chemical processes and industrial mass production of bulk materials, fine chemicals, pharmaceuticals and many other products. The book takes the readers from the fundamentals of engineering methods, transport processes, and fluid dynamics to device conception, simulation and modelling, control interfaces and issues of modularity and compatibility. Fabrication strategies and techniques are examined next, focused on the fabrication of suitable microcomponents from various materials such as metals, polymers, silicon, ceramics and glass. The book concludes with actual applications and operational aspects of micro process systems, giving broad coverage to industrial efforts in America, Europe and Asia as well as laboratory equipment and education.

Optimization and Inverse Problems in Electromagnetism

Author: Marek Rudnicki

Publisher: Springer Science & Business Media

Published: 2013-04-17

Total Pages: 348

ISBN-13: 9401724946

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From 12 to 14 September 2002, the Academy of Humanities and Economics (AHE) hosted the workshop "Optimization and Inverse Problems in Electromagnetism". After this bi-annual event, a large number of papers were assembled and combined in this book. During the workshop recent developments and applications in optimization and inverse methodologies for electromagnetic fields were discussed. The contributions selected for the present volume cover a wide spectrum of inverse and optimal electromagnetic methodologies, ranging from theoretical to practical applications. A number of new optimal and inverse methodologies were proposed. There are contributions related to dedicated software. Optimization and Inverse Problems in Electromagnetism consists of three thematic chapters, covering: -General papers (survey of specific aspects of optimization and inverse problems in electromagnetism), -Methodologies, -Industrial Applications. The book can be useful to students of electrical and electronics engineering, computer science, applied mathematics (PhD level) and to researchers interested in the topic.

Modeling MEMS and NEMS

Author: John A. Pelesko

Publisher: CRC Press

Published: 2002-11-25

Total Pages: 382

ISBN-13: 1420035290

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Designing small structures necessitates an a priori understanding of various device behaviors. The way to gain such understanding is to construct, analyze, and interpret the proper mathematical model. Through such models, Modeling MEMS and NEMS illuminates microscale and nanoscale phenomena, thereby facilitating the design and optimization o

Mems/Nems

Author: Cornelius T. Leondes

Publisher: Springer Science & Business Media

Published: 2007-10-08

Total Pages: 2142

ISBN-13: 0387257861

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This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.

Design Sensitivity Analysis and Optimization of Electromagnetic Systems

Author: Il Han Park

Publisher: Springer

Published: 2018-08-27

Total Pages: 368

ISBN-13: 9811302308

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This book presents a comprehensive introduction to design sensitivity analysis theory as applied to electromagnetic systems. It treats the subject in a unified manner, providing numerical methods and design examples. The specific focus is on continuum design sensitivity analysis, which offers significant advantages over discrete design sensitivity methods. Continuum design sensitivity formulas are derived from the material derivative in continuum mechanics and the variational form of the governing equation. Continuum sensitivity analysis is applied to Maxwell equations of electrostatic, magnetostatic and eddy-current systems, and then the sensitivity formulas for each system are derived in a closed form; an integration along the design interface. The book also introduces the recent breakthrough of the topology optimization method, which is accomplished by coupling the level set method and continuum design sensitivity. This topology optimization method enhances the possibility of the global minimum with minimised computational time, and in addition the evolving shapes during the iterative design process are easily captured in the level set equation. Moreover, since the optimization algorithm is transformed into a well-known transient analysis algorithm for differential equations, its numerical implementation becomes very simple and convenient. Despite the complex derivation processes and mathematical expressions, the obtained sensitivity formulas are very straightforward for numerical implementation. This book provides detailed explanation of the background theory and the derivation process, which will help readers understand the design method and will set the foundation for advanced research in the future.

Bio and Nano Packaging Techniques for Electron Devices

Author: Gerald Gerlach

Publisher: Springer Science & Business Media

Published: 2012-07-16

Total Pages: 619

ISBN-13: 3642285228

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This book discusses future trends and developments in electron device packaging and the opportunities of nano and bio techniques as future solutions. It describes the effect of nano-sized particles and cell-based approaches for packaging solutions with their diverse requirements. It offers a comprehensive overview of nano particles and nano composites and their application as packaging functions in electron devices. The importance and challenges of three-dimensional design and computer modeling in nano packaging is discussed; also ways for implementation are described. Solutions for unconventional packaging solutions for metallizations and functionalized surfaces as well as new packaging technologies with high potential for industrial applications are discussed. The book brings together a comprehensive overview of nano scale components and systems comprising electronic, mechanical and optical structures and serves as important reference for industrial and academic researchers.