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Mechanics of Microsystems

Author: Alberto Corigliano

Publisher: John Wiley & Sons

Published: 2017-11-20

Total Pages: 424

ISBN-13: 1119053811

Mechanics of Microsystems Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability Mechanics of Microsystems takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry. Mechanics of Microsystems is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device. Key features: Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues. Includes examples of applications in industry. Accompanied by a website hosting supplementary material. The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.

Mechanics of Microelectromechanical Systems

Author: Nicolae Lobontiu

Publisher: Springer Science & Business Media

Published: 2004-09-30

Total Pages: 432

ISBN-13: 9781402080135

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This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer’s viewpoint as devices that transform an input form of energy, such as thermal, electrostatic, electromagnetic or optical, into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MEMS, and would hopefully enhance the efficiency of modeling and designing reliable and desirably-optimized microsystems. The work represents an attempt at both extending and deepening the mechanical-based approach to MEMS in the static domain by providing simple, yet reliable tools that are applicable to micromechanism design through current fabrication technologies. Lumped-parameter stiffness and compliance properties of flexible components are derived both analytically (as closed-form solutions) and as simplified (engineering) formulas. Also studied are the principal means of actuation/sensing and their integration into the overall microsystem. Various examples of MEMS are studied in order to better illustrate the presentation of the different modeling principles and algorithms. Through its objective, approach and scope, this book offers a novel and systematic insight into the MEMS domain and complements existing work in the literature addressing part of the material developed herein.

Mechanics of Microsystems

Author: Alberto Corigliano

Publisher: John Wiley & Sons

Published: 2018-04-02

Total Pages: 332

ISBN-13: 1119053838

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Comprehensive Microsystems

Author: Yogesh B. Gianchandani

Publisher:

Published: 2008

Total Pages: 0

ISBN-13: 9780444521910

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The only comprehensive reference available on Microelectromechanical Systems (MEMS). This set provides an exhaustive overview of the wide range of topics which comprise the microsystems field. This is essential reference for both academics and professionals in the field.

Mechanics of Microelectronics

Author: G.Q. Zhang

Publisher: Springer Science & Business Media

Published: 2006-08-25

Total Pages: 580

ISBN-13: 1402049358

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This book is written by leading experts with both profound knowledge and rich practical experience in advanced mechanics and the microelectronics industry essential for current and future development. It aims to provide the cutting edge knowledge and solutions for various mechanical related problems, in a systematic way. It contains important and detailed information about the state-of-the-art theories, methodologies, the way of working and real case studies.

Dynamics of Microelectromechanical Systems

Author: Nicolae Lobontiu

Publisher: Springer Science & Business Media

Published: 2014-07-08

Total Pages: 411

ISBN-13: 0387681957

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Here is a textbook for senior undergraduate and graduate level students that offers a novel and systematic look into the dynamics of MEMS. It includes numerous solved examples together with the proposed problems. The material to be found here will also be of interest to researchers with a non-mechanical background. The book focuses on the mechanical domain, specifically the dynamic sub-domain, and provides an in-depth treatment of problems that involve reliable modeling, analysis and design.

Microsystems Dynamics

Author: Vytautas Ostasevicius

Publisher: Springer Science & Business Media

Published: 2010-11-01

Total Pages: 222

ISBN-13: 9048197015

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In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. MEMS manufacturing techniques are essentially the same as those used in the semiconductor industry, therefore they can be produced in large quantities at low cost. The added benefits of lightweight, miniature size and low energy consumption make MEMS commercialization very attractive. Modeling and simulation is an indispensable tool in the process of studying these new dynamic phenomena, development of new microdevices and improvement of the existing designs. MEMS technology is inherently multidisciplinary since operation of microdevices involves interaction of several energy domains of different physical nature, for example, mechanical, fluidic and electric forces. Dynamic behavior of contact-type electrostatic microactuators, such as a microswitches, is determined by nonlinear fluidic-structural, electrostatic-structural and vibro-impact interactions. The latter is particularly important: Therefore it is crucial to develop accurate computational models for numerical analysis of the aforementioned interactions in order to better understand coupled-field effects, study important system dynamic characteristics and thereby formulate guidelines for the development of more reliable microdevices with enhanced performance, reliability and functionality.

Mechanics Over Micro and Nano Scales

Author: Suman Chakraborty

Publisher: Springer Science & Business Media

Published: 2011-06-08

Total Pages: 275

ISBN-13: 144199601X

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Mechanics Over Micro and Nano Scales covers the recent developments in the fields of mechanics in all forms over micro, meso and nano scales. Special emphasis is given to related novel applications and includes fundamental aspects of fluid and solid mechanics, soft matters, scaling laws, and synthetic biology. At the micro and nano scales, realization of many technologically viable ideas relies on the skillful integration of mechanics at macroscopic and molecular levels, both for solids as well as fluids. Research in the related areas is no longer confined to the understanding of the governing the physics of the system, but is also responsible for triggering a technological revolution at small scales. This book also: discusses the fundamentals of mechanics over micro and nano scales in a level accessible to multi-disciplinary researchers, with a balance of mathematical details and physical principles, covers life sciences and chemistry for use in emerging applications related to mechanics over small scales and demonstrates the explicit interconnection between various scale issues and the mechanics of miniaturized systems. Mechanics Over Micro and Nano Scales is an ideal book for researchers and engineers working in mechanics of both solids and fluids.

Microsystem Design

Author: Stephen D. Senturia

Publisher: Springer Science & Business Media

Published: 2005-12-20

Total Pages: 699

ISBN-13: 0306476010

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It is a real pleasure to write the Foreword for this book, both because I have known and respected its author for many years and because I expect this book’s publication will mark an important milestone in the continuing worldwide development of microsystems. By bringing together all aspects of microsystem design, it can be expected to facilitate the training of not only a new generation of engineers, but perhaps a whole new type of engineer – one capable of addressing the complex range of problems involved in reducing entire systems to the micro- and nano-domains. This book breaks down disciplinary barriers to set the stage for systems we do not even dream of today. Microsystems have a long history, dating back to the earliest days of mic- electronics. While integrated circuits developed in the early 1960s, a number of laboratories worked to use the same technology base to form integrated sensors. The idea was to reduce cost and perhaps put the sensors and circuits together on the same chip. By the late-60s, integrated MOS-photodiode arrays had been developed for visible imaging, and silicon etching was being used to create thin diaphragms that could convert pressure into an electrical signal. By 1970, selective anisotropic etching was being used for diaphragm formation, retaining a thick silicon rim to absorb package-induced stresses. Impurity- and electrochemically-based etch-stops soon emerged, and "bulk micromachining" came into its own.

Micromechanics and Nanoscale Effects

Author: Vasyl Michael Harik

Publisher: Springer Science & Business Media

Published: 2004-02-29

Total Pages: 268

ISBN-13: 9781402019685

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This volume consists of the state-of-the-art reports on new developments in micromechanics and the modeling of nanoscale effects, and is a companion book to the recent Kluwer volume on nanomechanics and mul- scale modeling (it is entitled Trends in Nanoscale Mechanics). The two volumes grew out of a series of discussions held at NASA Langley Research Center (LaRC), lectures and other events shared by many researchers from the national research laboratories and academia. The key events include the 2001 Summer Series of Round-Table Discussions on Nanotechnology at ICASE Institute (NASA LaRC) organized by Drs. V. M. Harik and M. D. Salas and the 2002 NASA LaRC Workshop on Multi-scale Modeling. The goal of these interactions was to foster collaborations between academic researchers and the ICASE Institute (NASA LaRC), a universi- based institute, which has pioneered world-class computational, theoretical and experimental research in the disciplines that are important to NASA. Editors gratefully acknowledge help of Ms. E. Todd (ICASE, NASA LaRC), the ICASE Director M. D. Salas and all reviewers, in particular, Dr. B. Diskin (ICASE/NIA, NASA LaRC), Prof. R. Haftka (University of Florida), Dr. V. M. Harik (ICASE/Swales Aerospace, NASA LaRC), Prof.