Measurement Technology for Micro-nanometer Devices
Author: Wendong Zhang
Publisher:
Published: 2017
Total Pages:
ISBN-13: 9781118717974
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Measurement Technology for Micro-Nanometer Devices
Author: Wendong Zhang
Publisher: John Wiley & Sons
Published: 2017-01-17
Total Pages: 341
ISBN-13: 1118717961
DOWNLOAD EBOOK →A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale • Highlights the advanced research work from industry and academia in micro-nano devices test technology • Written at both introductory and advanced levels, provides the fundamentals and theories • Focuses on the measurement techniques for characterizing MEMS/NEMS devices
Measurement Technology and Intelligent Instruments VIII
Author: Wei Gao
Publisher: Trans Tech Publications Ltd
Published: 2008-06-12
Total Pages: 674
ISBN-13: 3038131830
DOWNLOAD EBOOK →Volume is indexed by Thomson Reuters BCI (WoS). Measurement, rigorously defined as ascertaining the size, amount or degree of a measurand by instrumental comparison with a standard unit or by indirect calculation based upon theory, is what makes science and technology different to imagination. Measurement is essential in industry, commerce and daily life. In the manufacturing industry in particular, measurement and instrumentation technology play increasingly important roles not only in the traditional field of manufacturing but also in the new fields of micro/nano technology and bioengineering. This book presents recent advances in the use of measurement and instrumentation in the manufacturing industry. A wide range of topics are covered including: micro/nano-metrology,precision measurements,online and in-process measurements,surface metrology,optical metrology and image processing,bio-measurement, sensor technology,intelligent measurement and instrumentation,uncertainty, traceability and calibration and signal-processing algorithms.
Semiconductor Measurement Technology
Semiconductor Measurement Technology
Author: National Institute of Standards and Technology (U.S.)
Publisher:
Published: 1990
Total Pages: 128
ISBN-13:
DOWNLOAD EBOOK →Optical Test and Measurement Technology and Equipment
Nanotechnology and Nanoelectronics
Author: Wolfgang Fahrner
Publisher: Springer Science & Business Media
Published: 2005-12-05
Total Pages: 277
ISBN-13: 3540266216
DOWNLOAD EBOOK →Split a human hair thirty thousand times, and you have the equivalent of a nanometer. The aim of this work is to provide an introduction into nanotechnology for the s- entifically interested. However, such an enterprise requires a balance between comprehensibility and scientific accuracy. In case of doubt, preference is given to the latter. Much more than in microtechnology – whose fundamentals we assume to be known – a certain range of engineering and natural sciences are interwoven in nanotechnology. For instance, newly developed tools from mechanical engine- ing are essential in the production of nanoelectronic structures. Vice versa, - chanical shifts in the nanometer range demand piezoelectric-operated actuators. Therefore, special attention is given to a comprehensive presentation of the matter. In our time, it is no longer sufficient to simply explain how an electronic device operates; the materials and procedures used for its production and the measuring instruments used for its characterization are equally important. The main chapters as well as several important sections in this book end in an evaluation of future prospects. Unfortunately, this way of separating coherent - scription from reflection and speculation could not be strictly maintained. So- times, the complete description of a device calls for discussion of its inherent - tential; the hasty reader in search of the general perspective is therefore advised to study this work’s technical chapters as well.
Nanoscale Calibration Standards and Methods
Author: Günter Wilkening
Publisher: John Wiley & Sons
Published: 2006-05-12
Total Pages: 541
ISBN-13: 3527606874
DOWNLOAD EBOOK →The quantitative determination of the properties of micro- and nanostructures is essential in research and development. It is also a prerequisite in process control and quality assurance in industry. The knowledge of the geometrical dimensions of structures in most cases is the base, to which other physical and chemical properties are linked. Quantitative measurements require reliable and stable instruments, suitable measurement procedures as well as appropriate calibration artefacts and methods. The seminar "NanoScale 2004" (6th Seminar on Quantitative Microscopy and 2nd Seminar on Nanoscale Calibration Standards and Methods) at the National Metrology Institute (Physikalisch-Technische Bundesanstalt PTB), Braunschweig, Germany, continues the series of seminars on Quantitative Microscopy. The series stimulates the exchange of information between manufacturers of relevant hard- and software and the users in science and industry. Topics addressed in these proceedings are a) the application of quantitative measurements and measurement problems in: microelectronics, microsystems technology, nano/quantum/molecular electronics, chemistry, biology, medicine, environmental technology, materials science, surface processing b) calibration & correction methods: calibration methods, calibration standards, calibration procedures, traceable measurements, standardization, uncertainty of measurements c) instrumentation and methods: novel/improved instruments and methods, reproducible probe/sample positioning, position-measuring systems, novel/improved probe/detector systems, linearization methods, image processing
Measurement Technology and Intelligent Instruments IX
Author: Yuri Chugui
Publisher: Trans Tech Publications
Published: 2010
Total Pages: 0
ISBN-13: 9780878492732
DOWNLOAD EBOOK →A collection that focuses on measurement science and metrology: micro- and nano-measurements; novel measurement methods and diagnostic technologies, including non-destructive and dimensional inspection, optical and X-ray tomography and interferometry, and terahertz technologies for science, industry and biomedicine.
Micro-Nano Mechatronics
Author: Chikara Nagai
Publisher: BoD – Books on Demand
Published: 2013-06-05
Total Pages: 380
ISBN-13: 9535111043
DOWNLOAD EBOOK →Micro/Nano mechatronics is currently used in broader spectra, ranging from basic applications in robotics, actuators, sensors, semiconductors, automobiles, and machine tools. As a strategic technology highlighting the 21st century, this technology is extended to new applications in bio-medical systems and life science, construction machines, and aerospace equipment, welfare/human life engineering, and other brand new scopes. Basically, the miniaturizing technology is important to realize high performance, low energy consumption, low cost performance, small space instrumentation, light-weight, and so on. This book presents the summary of our project Center of Excellence for Education and Research of Micro-Nano Mechatronics. The project implements a strategy to realize applications of micro-nano mechatronics, which are based on mechanical engineering or materials science, control systems engineering, and advanced medical engineering. The chapters describe the research advances in micro/nano measurement and control, micro/nano design and manufacturing, nano materials science, and their applications in biomedical engineering. The publication of this book was supported by Nagoya University, the 21st COE program "Micro- and NanoMechatronics for Information-Based Society," and the global COE program “COE for Education and Research of Micro-Nano Mechatronics.”
