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Kinetics and Spectroscopy of Low Temperature Plasmas

Author: Jorge Loureiro

Publisher: Springer

Published: 2016-06-22

Total Pages: 460

ISBN-13: 3319092537

This is a comprehensive textbook designed for graduate and advanced undergraduate students. Both authors rely on more than 20 years of teaching experience in renowned Physics Engineering courses to write this book addressing the students’ needs. Kinetics and Spectroscopy of Low Temperature Plasmas derives in a full self-consistent way the electron kinetic theory used to describe low temperature plasmas created in the laboratory with an electrical discharge, and presents the main optical spectroscopic diagnostics used to characterize such plasmas. The chapters with the theoretical contents make use of a deductive approach in which the electron kinetic theory applied to plasmas with basis on the electron Boltzmann equation is derived from the basic concepts of Statistical and Plasma Physics. On the other hand, the main optical spectroscopy diagnostics used to characterize experimentally such plasmas are presented and justified from the point of view of the Atomic and Molecular Physics. Low temperature plasmas (LTP) are partially ionized gases with a broad use in many technological applications such as microelectronics, light sources, lasers, biology and medicine. LTPs lead to the production of atomic and molecular excited states, chemically reactive radicals, and activated surface sites, which are in the origin, among others, of the deposition of thin films, advanced nanotechnology products, solar cells, highly efficient combustion motors, and treatment of cancer cells.

Kinetics and Spectroscopy of Low Temperature Plasmas

Author: Alden Aubert

Publisher:

Published: 2017-05-15

Total Pages: 418

ISBN-13: 9781974385461

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Kinetics and Spectroscopy of Low Temperature Plasmas derives in a full self-consistent way the electron kinetic theory used to describe low temperature plasmas created in the laboratory with an electrical discharge, and presents the main optical spectroscopic diagnostics used to characterize such plasmas. The chapters with the theoretical contents make use of a deductive approach in which the electron kinetic theory applied to plasmas with basis on the electron Boltzmann equation is derived from the basic concepts of Statistical and Plasma Physics. On the other hand, the main optical spectroscopy diagnostics used to characterize experimentally such plasmas are presented and justified from the point of view of the Atomic and Molecular Physics.

Kinetics of Nonequilibrium Low-Temperature Plasmas

Author: Leon Mikhaĭlovich Biberman

Publisher: Springer

Published: 1987-09-30

Total Pages: 512

ISBN-13:

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The first research on plasma was done in connection with the study of electrical discharges in gases. The focus of attention for physicists was the partially ionized plasma, the kinetics of which is governed by various collisional and radiative processes. The choice of this area of research was motivated largely by the practical problems of that time the creation of gas-discharge light sources, rectifiers, and inverters. Since the early 1950s interest in plasma physics has risen sharply, particularly in the study of the completely ionized plasma with its various collective phenomena, insta bilities, and the interesting and sometimes unexpected effects attending the propagation of electromagnetic waves in such a plasma and the action on it of external electric and magnetic fields. Interest in hot plasmas has been stimulated not only by the diverse and novel physical phenomena, but also by the problems arising in connection with controlled nuclear fusion. The advent, in the early 1960s, of new technical fields such as gas-discharge lasers, magnetohydrodynamic generators, thermoemission converters, plasma chemistry, plasma propul sion devices, various methods in plasma technology, etc. , has led to increased interest in weakly ionized low-tempera ture plasmas. This is particularly true of nonequilibrium plasmas, which are characterized by an extraordinary diver sity of states and properties.

Spectroscopy of Low Temperature Plasma

Author: Vladimir N. Ochkin

Publisher: John Wiley & Sons

Published: 2009-05-13

Total Pages: 630

ISBN-13: 3527627510

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Written by a distinguished plasma scientist and experienced author, this up-to-date work comprehensively covers current methods and new developments and techniques, including non-equilibrium atomic and molecular plasma states, as well as such new applications as gas lasers. Containing numerous appendices with reference data indispensable for plasma spectroscopy, such as statistical weights and partition sums and diatomic molecules. For plasmaphysicists, spectroscopists, materials scientists and physical chemists. Appendix H is only available online.

Kinetics of Nonequilibrium Low-Temperature Plasmas

Author: L.M. Biberman

Publisher: Springer

Published: 2013-05-14

Total Pages: 0

ISBN-13: 9781468416657

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Lecture Notes on Principles of Plasma Processing

Author: Francis F. Chen

Publisher: Springer Science & Business Media

Published: 2012-12-06

Total Pages: 213

ISBN-13: 1461501814

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Plasma processing of semiconductors is an interdisciplinary field requiring knowledge of both plasma physics and chemical engineering. The two authors are experts in each of these fields, and their collaboration results in the merging of these fields with a common terminology. Basic plasma concepts are introduced painlessly to those who have studied undergraduate electromagnetics but have had no previous exposure to plasmas. Unnecessarily detailed derivations are omitted; yet the reader is led to understand in some depth those concepts, such as the structure of sheaths, that are important in the design and operation of plasma processing reactors. Physicists not accustomed to low-temperature plasmas are introduced to chemical kinetics, surface science, and molecular spectroscopy. The material has been condensed to suit a nine-week graduate course, but it is sufficient to bring the reader up to date on current problems such as copper interconnects, low-k and high-k dielectrics, and oxide damage. Students will appreciate the web-style layout with ample color illustrations opposite the text, with ample room for notes. This short book is ideal for new workers in the semiconductor industry who want to be brought up to speed with minimum effort. It is also suitable for Chemical Engineering students studying plasma processing of materials; Engineers, physicists, and technicians entering the semiconductor industry who want a quick overview of the use of plasmas in the industry.

Plasma Kinetics in Atmospheric Gases

Author: M. Capitelli

Publisher: Springer Science & Business Media

Published: 2013-03-09

Total Pages: 302

ISBN-13: 3662041588

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Emphasis is placed on the analysis of translational, rotational, vibrational and electronically excited state kinetics, coupled to the electron Boltzmann equation.

Low Temperature Plasma Technology

Author: Paul K. Chu

Publisher: CRC Press

Published: 2013-07-15

Total Pages: 488

ISBN-13: 1466509910

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Written by a team of pioneering scientists from around the world, Low Temperature Plasma Technology: Methods and Applications brings together recent technological advances and research in the rapidly growing field of low temperature plasmas. The book provides a comprehensive overview of related phenomena such as plasma bullets, plasma penetration i

Introduction to Plasma Spectroscopy

Author: Hans-Joachim Kunze

Publisher: Springer Science & Business Media

Published: 2009-09-18

Total Pages: 242

ISBN-13: 3642022332

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Although based on lectures given for graduate students and postgraduates starting in plasma physics, this concise introduction to the fundamental processes and tools is as well directed at established researchers who are newcomers to spectroscopy and seek quick access to the diagnostics of plasmas ranging from low- to high-density technical systems at low temperatures, as well as from low- to high-density hot plasmas. Basic ideas and fundamental concepts are introduced as well as typical instrumentation from the X-ray to the infrared spectral regions. Examples, techniques and methods illustrate the possibilities. This book directly addresses the experimentalist who actually has to carry out the experiments and their interpretation. For that reason about half of the book is devoted to experimental problems, the instrumentation, components, detectors and calibration.

Kinetics of Low-temperature Fuel Oxidation and Ignition by Repetitively Pulsed Nonequilibrium Plasmas

Author: Sherrie S. Bowman

Publisher:

Published: 2010

Total Pages: 89

ISBN-13:

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OH A to X(0,0) spontaneous emission spectroscopy is used to confirm ignition. The presence of a "footprint" in the emission trace (indicating emission, and thus ignition, between the pulses) is observed in pressures from 50 to 100 Torr and in equivalence ratios from f=0.3 to 1.0. Ignition delay time, as defined as the onset of continuous OH emission between pulses, is found to be a strong function of pressure, but only a weak function of equivalence ratio.