Ion Implantation Technology - 94

Ion Implantation Technology - 94 PDF

Author: S. Coffa

Publisher: Newnes

Published: 1995-05-16

Total Pages: 1031

ISBN-13: 044459972X

DOWNLOAD EBOOK →

The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters. The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.

Ion Implantation Technology-94

Ion Implantation Technology-94 PDF

Author: S. Coffa

Publisher: North-Holland

Published: 1995-01-01

Total Pages: 1012

ISBN-13: 9780444821942

DOWNLOAD EBOOK →

The aim of these proceedings is to present and stimulate discussion on the many subjects related to ion implantation among a broad mix of specialists from areas as diverse as materials science, device production and advanced ion implanters.The contents open with a paper on the future developments of the microelectronics industry in Europe within the framework of the global competition. The subsequent invited and oral presentations cover in detail the following areas: trends in processing and devices, ion-solid interaction, materials science issues, advanced implanter systms, process control and yield, future trends and applications.

Ion Implantation Technology - 92

Ion Implantation Technology - 92 PDF

Author: D.F. Downey

Publisher: Elsevier

Published: 2012-12-02

Total Pages: 716

ISBN-13: 0444599800

DOWNLOAD EBOOK →

Ion implantation technology has made a major contribution to the dramatic advances in integrated circuit technology since the early 1970's. The ever-present need for accurate models in ion implanted species will become absolutely vital in the future due to shrinking feature sizes. Successful wide application of ion implantation, as well as exploitation of newly identified opportunities, will require the development of comprehensive implant models. The 141 papers (including 24 invited papers) in this volume address the most recent developments in this field. New structures and possible approaches are described. The implications for ion implantation technology as well as additional observations of needs and opportunities are discussed. The volume will be of value to all those who are interested in acquiring a more complete understanding of the current developments in ion implantation processes and comprehensive implant models.

Ion Implantation Science and Technology

Ion Implantation Science and Technology PDF

Author: J.F. Ziegler

Publisher: Elsevier

Published: 2012-12-02

Total Pages: 649

ISBN-13: 0323144012

DOWNLOAD EBOOK →

Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic ions into solids; damage annealing in silicon; and ion implantation metallurgy. Part 2 covers areas such as ion implementation system concepts; ion sources; underlying principles related to ion optics; and safety and radiation considerations in ion implantation. The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.

Ion Implantation Technology

Ion Implantation Technology PDF

Author: Edmund G. Seebauer

Publisher: American Institute of Physics

Published: 2008-12-11

Total Pages: 582

ISBN-13: 9780735405974

DOWNLOAD EBOOK →

The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).

Ion Impantation Technology

Ion Impantation Technology PDF

Author: Karen J. Kirkby

Publisher: American Institute of Physics

Published: 2006-12-04

Total Pages: 690

ISBN-13: 9780735403659

DOWNLOAD EBOOK →

This is the premier world conference for the presentation of the latest advances in ion implantation, from the fundamentals of ion-solid interactions to manufacturing implant equipment. All papers were peer-reviewed. Ion implantation is used to manufacture semiconductor devices. Materials properties are changed by bombarding wafers with atoms, which are accelerated in an ion implanter.

Lanterna Rally - Theme by Grace Themes