Handbook of VLSI Microlithography, 2nd Edition

Handbook of VLSI Microlithography, 2nd Edition PDF

Author: John N. Helbert

Publisher: Cambridge University Press

Published: 2001-04

Total Pages: 1026

ISBN-13: 0080946801

DOWNLOAD EBOOK →

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatingsùincluding optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely coveredùincluding an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.

Handbook of VLSI Microlithography

Handbook of VLSI Microlithography PDF

Author: William B. Glendinning

Publisher: William Andrew

Published: 2012-12-02

Total Pages: 671

ISBN-13: 1437728227

DOWNLOAD EBOOK →

This handbook gives readers a close look at the entire technology of printing very high resolution and high density integrated circuit (IC) patterns into thin resist process transfer coatings-- including optical lithography, electron beam, ion beam, and x-ray lithography. The book's main theme is the special printing process needed to achieve volume high density IC chip production, especially in the Dynamic Random Access Memory (DRAM) industry. The book leads off with a comparison of various lithography methods, covering the three major patterning parameters of line/space, resolution, line edge and pattern feature dimension control. The book's explanation of resist and resist process equipment technology may well be the first practical description of the relationship between the resist process and equipment parameters. The basics of resist technology are completely covered -- including an entire chapter on resist process defectivity and the potential yield limiting effect on device production. Each alternative lithographic technique and testing method is considered and evaluated: basic metrology including optical, scanning-electron-microscope (SEM) techniques and electrical test devices, along with explanations of actual printing tools and their design, construction and performance. The editor devotes an entire chapter to today's sophisticated, complex electron-beam printers, and to the emerging x-ray printing technology now used in high-density CMOS devices. Energetic ion particle printing is a controllable, steerable technology that does not rely on resist, and occupies a final section of the handbook.

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography

Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography PDF

Author: P. Rai-Choudhury

Publisher: SPIE Press

Published: 1997

Total Pages: 780

ISBN-13: 9780819423788

DOWNLOAD EBOOK →

The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.

VLSI Handbook

VLSI Handbook PDF

Author: Norman Einspruch

Publisher: Academic Press

Published: 2012-12-02

Total Pages: 929

ISBN-13: 0323141994

DOWNLOAD EBOOK →

VLSI Handbook is a reference guide on very large scale integration (VLSI) microelectronics and its aspects such as circuits, fabrication, and systems applications. This handbook readily answers specific questions and presents a systematic compilation of information regarding the VLSI technology. There are a total of 52 chapters in this book and are grouped according to the fields of design, materials and processes, and examples of specific system applications. Some of the chapters under fields of design are design automation for integrated circuits and computer tools for integrated circuit design. For the materials and processes, there are many chapters that discuss this aspect. Some of them are manufacturing process technology for metal-oxide semiconductor (MOS) VLSI; MOS VLSI circuit technology; and facilities for VLSI circuit fabrication. Other concepts and materials discussed in the book are the use of silicon material in different processes of VLSI, nitrides, silicides, metallization, and plasma. This handbook is very useful to students of engineering and physics. Also, researchers (in physics and chemistry of materials and processes), device designers, and system designers can also benefit from this book.

Scientific Photography and Applied Imaging

Scientific Photography and Applied Imaging PDF

Author: Sidney Ray

Publisher: CRC Press

Published: 1999-08-02

Total Pages: 559

ISBN-13: 1136094385

DOWNLOAD EBOOK →

WINNER OF THE 2001 KRASZNA-KRAUSZ PHOTOGRAPHY BOOK AWARD (Technical Photography category) The only definitive book to fully encompass the use of photography and imaging as tools in science, technology and medicine. It describes in one single volume the basic theory, techniques, materials, special equipment and applications for a wide variety of uses of photography, including: close up photography and photomacrography to spectral recording, surveillance systems, radiography and micro-imaging. This extensively illustrated photography 'bible' contains all the information you need, whether you are a scientist wishing to use photography for a specialist application, a professional needing to extend technical expertise, or a student wanting to broaden your knowledge of the applications of photography. The contents are arranged in three sections: · General Section, detailing the elements of the image capture process · Major Applications, describing the major applications of imaging · Specialist Applications, presenting an eclectic selection of more specialised but increasingly important applications Each subject is introduced with an outline of its development and contemporary importance, followed by explanations of essential theory and an overview of techniques and equipment. Mathematics is only used where necessary. Numerous applications and case studies are described. Comprehensive bibliographies and references are provided for further study.

Program Management for System on Chip Platforms

Program Management for System on Chip Platforms PDF

Author: Whitson G. Waldo

Publisher: First Books

Published: 2010-09

Total Pages: 314

ISBN-13: 1592994830

DOWNLOAD EBOOK →

A Fully Integrated Presentation of New Hardware and Software Product Introductions Using Program Management Methodologies for System on Chip Platforms If you're an executive, manager, or engineer in the semiconductor, software, or systems industries, this book provides conceptual views ranging from the design of integrated circuits or systems on a chip, through fabrication, to integration of chips onto boards, and through development of enablement and runtime software for system and platform deliveries. Special features included this book are: - Program management methodologies - General management fundamentals - An overview of leadership principles - Basic discrete device technology - Internal structure and operation of some common logic gates - Basic integrated circuit design concepts, building blocks, and flow - Chip packaging technologies - Details of the fabrication process for integrated circuits - Printed circuit board design, manufacture, and test - Software design, development, and test - Integrated circuit test, silicon validation, and device qualification - Program management applications bringing it all together The book explores interactions and dependencies of technologies that impact systems and platforms. This is a valuable resource to learn these technologies or to use as a reference.

Lanterna Rally - Theme by Grace Themes