GB/T 16595-2019 Translated English of Chinese Standard. (GBT 16595-2019, GB/T16595-2019, GBT16595-2019)
Author: https://www.chinesestandard.net
Publisher: https://www.chinesestandard.net
Published: 2019-08-17
Total Pages: 10
ISBN-13:
DOWNLOAD EBOOK →This Standard specifies grid patterns that can be used to quantitatively describe surface defects on a circular semiconductor wafer. This Standard applies to silicon wafers of which the nominal diameter is 100 mm ~ 200 mm; it also applies to other semiconductor material wafers.