Fabrication Engineering at the Micro and Nanoscale

Fabrication Engineering at the Micro and Nanoscale PDF

Author: Stephen A. Campbell

Publisher: OUP USA

Published: 2008-01-10

Total Pages: 0

ISBN-13: 9780195320176

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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.

The Science and Engineering of Microelectronic Fabrication

The Science and Engineering of Microelectronic Fabrication PDF

Author: Stephen A. Campbell

Publisher: Oxford University Press, USA

Published: 1996

Total Pages: 572

ISBN-13:

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The Science and Engineering of Microelectronic Fabrication provides an introduction to microelectronic processing. Geared towards a wide audience, it may be used as a textbook for both first year graduate and upper level undergraduate courses and as a handy reference for professionals. The text covers all the basic unit processes used to fabricate integrated circuits including photolithography, plasma and reactive ion etching, ion implantation, diffusion, oxidation, evaporation, vapor phase epitaxial growth, sputtering and chemical vapor deposition. Advanced processing topics such as rapid thermal processing, nonoptical lithography, molecular beam epitaxy, and metal organic chemical vapor deposition are also presented. The physics and chemistry of each process is introduced along with descriptions of the equipment used for the manufacturing of integrated circuits. The text also discusses the integration of these processes into common technologies such as CMOS, double poly bipolar, and GaAs MESFETs. Complexity/performance tradeoffs are evaluated along with a description of the current state-of-the-art devices. Each chapter includes sample problems with solutions. The book also makes use of the process simulation package SUPREM to demonstrate impurity profiles of practical interest.

Microfabrication and Nanomanufacturing

Microfabrication and Nanomanufacturing PDF

Author: Mark J. Jackson

Publisher: CRC Press

Published: 2005-11-10

Total Pages: 416

ISBN-13: 1420028278

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Nanotechnology, seen as the next leap forward in the industrial revolution, requires that manufacturers develop processes that revolutionize the way small products are made. Microfabrication and Nanomanufacturing focuses on the technology of fabrication and manufacturing of engineering materials at these levels. The book provides an overview of techniques used in the semiconductor industry. It also discusses scaling and manufacturing processes operating at the nanoscale for non-semiconductor applications; the construction of nanoscale components using established lithographic techniques; bulk and surface micromachining techniques used for etching, machining, and molding procedures; and manufacturing techniques such as injection molding and hot embossing. This authoritative compilation describes non-traditional micro and nanoscale processing that uses a newly developed technique called pulsed water jet machining as well as the efficient removal of materials using optical energy. Additional chapters focus on the development of nanoscale processes for producing products other than semiconductors; the use of abrasive particles embedded in porous tools; and the deposition and application of nanocrystalline diamond. Economic factors are also presented and concern the promotion and commercialization of micro and nanoscale products and how demand will eventually drive the market.

Introduction to Microelectronic Fabrication

Introduction to Microelectronic Fabrication PDF

Author: Richard C. Jaeger

Publisher: Pearson

Published: 2002

Total Pages: 0

ISBN-13: 9780201444940

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For courses in Theory and Fabrication of Integrated Circuits. The author's goal in writing this text was to present a concise survey of the most up-to-date techniques in the field. It is devoted exclusively to processing, and is highlighted by careful explanations, clear, simple language, and numerous fully-solved example problems. This work assumes a minimal knowledge of integrated circuits and of terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors.

Fabrication Engineer

Fabrication Engineer PDF

Author: Stephen Campbell

Publisher:

Published: 2012-11-29

Total Pages: 82

ISBN-13: 9780199861217

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In the education area, Professor Campbell leads the University of Minnesota's participation in Nano-Link, an NSF sponsored regional center for nanotechnology education at the AAS level. He has designed and implemented a one-semester capstone experience Microelectronic Fabrication and created the text book as a result. Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, this fourthedition of Fabrication Engineering at the Micro- and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. The text covers the entire basic unitprocesses used to fabricate integrated circuits and other devices.

Microfabrication and Precision Engineering

Microfabrication and Precision Engineering PDF

Author: J Paulo Davim

Publisher: Woodhead Publishing

Published: 2017-01-15

Total Pages: 286

ISBN-13: 0857094866

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Microfabrication and precision engineering is an increasingly important area relating to metallic, polymers, ceramics, composites, biomaterials and complex materials. Micro-electro-mechanical-systems (MEMS) emphasize miniaturization in both electronic and mechanical components. Microsystem products may be classified by application, and have been applied to a variety of fields, including medical, automotive, aerospace and alternative energy. Microsystems technology refers to the products as well as the fabrication technologies used in production. With detailed information on modelling of micro and nano-scale cutting, as well as innovative machining strategies involved in microelectrochemical applications, microchannel fabrication, as well as underwater pulsed Laser beam cutting, among other techniques, Microfabrication and Precision Engineering is a valuable reference for students, researchers and professionals in the microfabrication and precision engineering fields. Contains contributions by top industry experts Includes the latest techniques and strategies Special emphasis given to state-of-the art research and development in microfabrication and precision engineering

Nanofabrication: Fundamentals And Applications

Nanofabrication: Fundamentals And Applications PDF

Author: Ampere A Tseng

Publisher: World Scientific

Published: 2008-03-04

Total Pages: 583

ISBN-13: 9814476773

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Many of the devices and systems used in modern industry are becoming progressively smaller and have reached the nanoscale domain. Nanofabrication aims at building nanoscale structures, which can act as components, devices, or systems, in large quantities at potentially low cost. Nanofabrication is vital to all nanotechnology fields, especially for the realization of nanotechnology that involves the traditional areas across engineering and science. This is the first book solely dedicated to the manufacturing technology in nanoscale structures, devices, and systems and is designed to satisfy the growing demands of researchers, professionals, and graduate students.Both conventional and non-conventional fabrication technologies are introduced with emphasis on multidisciplinary principles, methodologies, and practical applications. While conventional technologies consider the emerging techniques developed for next generation lithography, non-conventional techniques include scanning probe microscopy lithography, self-assembly, and imprint lithography, as well as techniques specifically developed for making carbon tubes and molecular circuits and devices.

Textiles in Automotive Engineering

Textiles in Automotive Engineering PDF

Author: W Fung

Publisher: Elsevier

Published: 2000-11-28

Total Pages: 378

ISBN-13: 185573897X

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This book presents a comprehensive treatment of both functional and decorative textiles used in the automotive industry including seat covers, headliners, airbags, seat belts and tyres. Written in a clear, concise style it explains material properties and the way in which they influence manufacturing processes as well as providing practical production details. The subject treatment cuts across the disciplines of textile chemistry, fabric and plastics technology and production engineering. Environmental effects and recycling are also covered. It is aimed at the design and process engineer in industry as well as researchers in universities and colleges. Quality engineers will also benefit from the book's sections on identifying problems and material limitations.

Microfluidics for Medical Applications

Microfluidics for Medical Applications PDF

Author: Albert van den Berg

Publisher: Royal Society of Chemistry

Published: 2014-11-19

Total Pages: 328

ISBN-13: 1849737592

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Lab-on-a-chip devices for point of care diagnostics have been present in clinics for several years now. Alongside their continual development, research is underway to bring the organs and tissue on-a-chip to the patient, amongst other medical applications of microfluidics. This book provides the reader with a comprehensive review of the latest developments in the application of microfluidics to medicine and is divided into three main sections. The first part of the book discusses the state-of-the-art in organs and tissue on a chip; the second provides a thorough background to microfluidics for medicine, and the third (and largest) section provides numerous examples of point-of-care diagnostics. Written with students and practitioners in mind, and with contributions from the leaders in the field across the globe, this book provides a complete digest of the state-of-the-art in microfluidics medical devices and will provide a handy resource for any laboratory or clinic involved in the development or application of such devices.

Self-Assembly of Nano- and Micro-structured Materials Using Colloidal Engineering

Self-Assembly of Nano- and Micro-structured Materials Using Colloidal Engineering PDF

Author: Dwaipayan Chakrabarti

Publisher: Elsevier

Published: 2019-04-25

Total Pages: 184

ISBN-13: 0081023030

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Self-assembly of Nano- and Micro-structured Materials Using Colloidal Engineering, Volume 12, covers the recent breakthroughs in the design and manufacture of functional colloids at the micro- and nanoscale level. In addition, it provides analyses on how these functionalities can be exploited to develop self-assembly pathways towards nano- and micro-structured materials. As we seek increasingly complex functions for colloidal superstructures, in silico design will play a critical role in guiding experimental fabrication by reducing the element of trial-and-error that would otherwise be involved. In addition to novel experimental approaches, recent developments in computational modelling are also presented, along with an overview of the arsenal of designing tools that are available to the modern materials scientist. Focuses on promoting feedback between experiment, theory and computation in this cross-disciplinary research area Shows how colloid science plays a crucial role in the bottom-up fabrication of nanostructured materials Presents recent developments in computational modelling