Dry Etching Technology for Semiconductors

Dry Etching Technology for Semiconductors PDF

Author: Kazuo Nojiri

Publisher: Springer

Published: 2014-10-25

Total Pages: 126

ISBN-13: 3319102958

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This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.

The Renaissance of Etching

The Renaissance of Etching PDF

Author: Catherine Jenkins

Publisher: Metropolitan Museum of Art

Published: 2019-10-21

Total Pages: 311

ISBN-13: 1588396495

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The Renaissance of Etching is a groundbreaking study of the origins of the etched print. Initially used as a method for decorating armor, etching was reimagined as a printmaking technique at the end of the fifteenth century in Germany and spread rapidly across Europe. Unlike engraving and woodcut, which required great skill and years of training, the comparative ease of etching allowed a wide variety of artists to exploit the expanding market for prints. The early pioneers of the medium include some of the greatest artists of the Renaissance, such as Albrecht Dürer, Parmigianino, and Pieter Bruegel the Elder, who paved the way for future printmakers like Rembrandt, Goya, and many others in their wake. Remarkably, contemporary artists still use etching in much the same way as their predecessors did five hundred years ago. Richly illustrated and including a wealth of new information, The Renaissance of Etching explores how artists in Germany, the Netherlands, Italy, and France developed the new medium of etching, and how it became one of the most versatile and enduring forms of printmaking. p.p1 {margin: 0.0px 0.0px 0.0px 0.0px; font: 14.0px Verdana}

Plasma Etching

Plasma Etching PDF

Author: M. Sugawara

Publisher: OUP Oxford

Published: 1998-05-28

Total Pages: 362

ISBN-13: 0191590290

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The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

Glass Etching

Glass Etching PDF

Author: Robert A. Capp

Publisher: Courier Corporation

Published: 1984-01-01

Total Pages: 66

ISBN-13: 0486245780

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Easy-to-use guide with complete instructions for etching on any glass — panes, panels, bottles, stained glass, more — using acid cream and sandblasting techniques. Includes 46 full-size patterns of birds, butterflies, animals, florals, geometrics, and Art-Nouveau-Style abstracts. Instructions. 46 patterns. 27 illustrations.

Etching, Engraving and Other Intaglio Printmaking Techniques

Etching, Engraving and Other Intaglio Printmaking Techniques PDF

Author: Ruth Leaf

Publisher: Courier Corporation

Published: 2012-07-12

Total Pages: 242

ISBN-13: 0486139247

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Comprehensive handbook covers materials and equipment, tools, printing papers, presses, and other essentials. Detailed instructions for etching, engraving, drypoint, collagraphs, tuilegraphs, and the Blake transfer method.

Glass Etching

Glass Etching PDF

Author: Norman Dobbins

Publisher: Cke Publications

Published: 1988

Total Pages: 116

ISBN-13:

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Instructions and patterns for glass etching using a sandblaster.