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Design and Manufacturing of Active Microsystems

Author: Stephanus Büttgenbach

Publisher: Springer Science & Business Media

Published: 2011-03-04

Total Pages: 447

ISBN-13: 364212903X

This book presents the design and manufacturing of microsystems as well as necessary key technologies developed within the Collaborative Research Center 516. The research efforts of this collaboration are focused on active micro systems which are based on the electromagnetic actuator principle. The travel of the investigated actuator systems is on the order of several millimeters. The total construction size of the actuator is on the range of several centimeters whereas essential structures being several micrometers. The methods and the production technologies that are investigated on the basis of various research models incorporate the fundamental process chains of microsystems.

Precision Assembly Technologies and Systems

Author: Svetan Ratchev

Publisher: Springer

Published: 2012-02-07

Total Pages: 223

ISBN-13: 364228163X

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This book constitutes the refereed proceedings of the 6th IFIP WG 5.5 International Precision Assembly Seminar, IPAS 2012, held in Chamonix, France, in February 2012. The 15 revised full papers were carefully reviewed and selected from numerous submissions. The papers are organized into the following topical sections: micro processes and systems; handling and manipulation in assembly; tolerance management and error compensation methods; metrology and quality control; intelligent control of assembly systems; and process selection and modelling techniques.

Process Variations in Microsystems Manufacturing

Author: Michael Huff

Publisher: Springer Nature

Published: 2020-04-09

Total Pages: 521

ISBN-13: 3030405605

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This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.

Micro-Assembly Technologies and Applications

Author: Sandra Koelemeijer

Publisher: Springer

Published: 2008-03-12

Total Pages: 400

ISBN-13: 038777405X

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Micro-assembly is a key enabling technology for cost effective manufacture of new generations of complex micro products. It is also a critical technology for retaining mdustrial capabilities in high labour cost areas such as Europe since up to 80% of the production cost in some industries is attributed directly to assembly processes. With the continuous trend for product miniaturisation, the scientific and technologi cal developments in micro-assembly are expected to have a significant long-term economic, demographic and social impact. A distinctive feature of the process is that surface forces are often dominant over gravity forces, which determines a number of specific technical challenges. Critical areas which are currently being addressed include development of assembly systems with high positional accuracy, micro gripping methods that take into ac count the adhesive surface forces, high precision micro-feeding techniques and mi cro-joining processes. Micro-assembly has developed rapidly over the last few years and all the pre dictions are that it will remain a critical technology for high value products in a number of key sectors such as healthcare, communications, defence and aerospace. The key challenge is to match the significant technological developments with a new generation of micro products that will establish firmly micro-assembly as a core manufacturing process.

Microengineering of Metals and Ceramics

Author: Henry Baltes

Publisher: John Wiley & Sons

Published: 2008-09-26

Total Pages: 306

ISBN-13: 3527616950

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Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Continuing from the previous volume, authors from three major competence centres for microengineering here cover all aspects of specialized replication techniques and how to employ state-of-the-art technologies for testing and characterizing micro-scale components, and illustrate quality control aspects and strategies for automation of production procedures in view of future industrial production and commercialisation.

MEMS and Microsystems

Author: Tai-Ran Hsu

Publisher: McGraw-Hill Science, Engineering & Mathematics

Published: 2002

Total Pages: 456

ISBN-13:

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Microsystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. Academics are desperate for texts to familiarise future engineers with this broad-ranging technology. This text provides an engineering design approach to MEMS and microsystems which is appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases and applied problems. The book is appropriate for mechanical and aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject. Electrical engineering students will be given strong coverage of the mechanical side of MEMS, something they may not receive elsewhere.

Cold Micro Metal Forming

Author: Frank Vollertsen

Publisher: Springer Nature

Published: 2019-09-13

Total Pages: 358

ISBN-13: 3030112802

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This open access book contains the research report of the Collaborative Research Center “Micro Cold Forming” (SFB 747) of the University of Bremen, Germany. The topical research focus lies on new methods and processes for a mastered mass production of micro parts which are smaller than 1mm (by forming in batch size higher than one million). The target audience primarily comprises research experts and practitioners in production engineering, but the book may also be of interest to graduate students alike.

Introduction to Microsystem Design

Author: Werner Karl Schomburg

Publisher: Springer

Published: 2015-06-25

Total Pages: 384

ISBN-13: 3662470233

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This book systematically describes the design options for micro systems as well as the equations needed for calculating the behavior of their basic elements. The fundamental equations needed to calculate the effects and forces that are important in micro systems are also provided. Readers do not require previous knowledge of fabrication processes. This second edition of the volume is a thoroughly revised and extended update. The target audience primarily comprises experts in the field of micro systems and the book is also suitable for graduate engineering students. For quick reference, equations are presented in tables that can be found in an index at the end of the book.

Micro and Nano Fabrication

Author: Hans H. Gatzen

Publisher: Springer

Published: 2015-01-02

Total Pages: 537

ISBN-13: 3662443953

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For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Transport Phenomena in Micro Process Engineering

Author: Norbert Kockmann

Publisher: Springer Science & Business Media

Published: 2007-11-12

Total Pages: 382

ISBN-13: 3540746188

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In this book, the fundamentals of chemical engineering are presented with respect to applications in micro system technology, microfluidics, and transport processes within microstructures. Special features of the book include the state-of-the-art in micro process engineering, a detailed treatment of transport phenomena for engineers, and a design methodology from transport effects to economic considerations.