Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7
Author: Dieter K. Schroder
Publisher: The Electrochemical Society
Published: 2007
Total Pages: 406
ISBN-13: 1566775698
DOWNLOAD EBOOK →Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques as well as advances in routine analytical technology applied to semiconductor process development and manufacture. The hardcover edition includes a CD-ROM of ECS Transactions, Volume 10, Issue 1, Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007). The PDF edition also includes the ALTECH 2007 papers.