A Guide to Hands-on MEMS Design and Prototyping

A Guide to Hands-on MEMS Design and Prototyping PDF

Author: Joel A. Kubby

Publisher: Cambridge University Press

Published: 2011-08-25

Total Pages: 195

ISBN-13: 1139498800

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Whether you are a student taking an introductory MEMS course or a practising engineer who needs to get up to speed quickly on MEMS design, this practical guide provides the hands-on experience needed to design, fabricate and test MEMS devices. You will learn how to use foundry multi-project fabrication processes for low-cost MEMS projects, as well as computer-aided design tools (layout, modeling) that can be used for the design of MEMS devices. Numerous design examples are described and analysed, from fields including micro-mechanics, electrostatics, optical MEMS, thermal MEMS and fluidic MEMS. There's also a final chapter on packaging and testing MEMS devices, as well as exercises and design challenges at the end of every chapter. Solutions to the design challenge problems are provided online.

MEMS Cost Analysis

MEMS Cost Analysis PDF

Author: Ron Lawes

Publisher: CRC Press

Published: 2016-04-19

Total Pages: 300

ISBN-13: 9814411078

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This volume demonstrates show cost analysis can be adapted to MEMS, taking into account the wide range of processes and equipment, the major differences with the established semiconductor industry, and the presence of both large-scale, product-orientated manufacturers and small- and medium-scale foundries. The content examines the processes and equ

MEMS: A Practical Guide of Design, Analysis, and Applications

MEMS: A Practical Guide of Design, Analysis, and Applications PDF

Author: Jan Korvink

Publisher: Springer Science & Business Media

Published: 2010-05-28

Total Pages: 981

ISBN-13: 3540336559

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A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.

MEMS: Field Models and Optimal Design

MEMS: Field Models and Optimal Design PDF

Author: Paolo Di Barba

Publisher: Springer

Published: 2019-06-26

Total Pages: 190

ISBN-13: 3030214966

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This book highlights numerical models as powerful tools for the optimal design of Micro-Electro-Mechanical Systems (MEMS). Most MEMS experts have a background in electronics, where circuit models or behavioral models (i.e. lumped-parameter models) of devices are preferred to field models. This is certainly convenient in terms of preliminary design, e.g. in the prototyping stage. However, design optimization should also take into account fine-sizing effects on device behavior and therefore be based on distributed-parameter models, such as finite-element models. The book shows how the combination of automated optimal design and field-based models can produce powerful design toolboxes for MEMS. It especially focuses on illustrating theoretical concepts with practical examples, fostering comprehension through a problem-solving approach. By comparing the results obtained using different methods, readers will learn to identify their respective strengths and weaknesses. In addition, special emphasis is given to evolutionary computing and nature-inspired optimization strategies, the effectiveness of which has already been amply demonstrated. Given its scope, the book provides PhD students, researchers and professionals in the area of computer-aided analysis with a comprehensive, yet concise and practice-oriented guide to MEMS design and optimization. To benefit most from the book, readers should have a basic grasp of electromagnetism, vector analysis and numerical methods.

Prototyping

Prototyping PDF

Author: Todd Zaki Warfel

Publisher: Rosenfeld Media

Published: 2009-11-01

Total Pages: 195

ISBN-13: 1933820225

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Prototyping is a great way to communicate the intent of a design both clearly and effectively. Prototypes help you to flesh out design ideas, test assumptions, and gather real-time feedback from users. With this book, Todd Zaki Warfel shows how prototypes are more than just a design tool by demonstrating how they can help you market a product, gain internal buy-in, and test feasibility with your development team.

MEMS

MEMS PDF

Author: Mohamed Gad-el-Hak

Publisher: CRC Press

Published: 2005-11-29

Total Pages: 678

ISBN-13: 1420036564

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Thoroughly revised and updated, the new edition of the best-selling MEMS Handbook is now presented as a three-volume set that offers state-of-the-art coverage of microelectromechanical systems. Through chapters contributed by top experts and pioneers in the field, MEMS: Design and Fabrication presents a comprehensive look at the materials, procedures, tools, and techniques of MEMS fabrication. New chapters in this edition examine the materials and fabrication of polymer microsystems and optical diagnostics for investigating the entrance length in microchannels. Rigorous yet accessible, this volume provides the practical knowledge needed for work in cutting-edge MEMS applications.

Mems

Mems PDF

Author: Jan Korvink

Publisher:

Published: 2010-06-06

Total Pages: 996

ISBN-13: 9783540860297

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